Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-
mechanical system (MOEMS) are the new-generation and recently well-developed …

This review surveys micromachined gyroscope structure and circuitry technology. The
principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS …

Micro-electromechenical Systems (MEMS) gyroscope is widely used in many occasions to
measure the angular speed of the moving objects and attracts the attentions of many …

A micro optoelectromechanical system (MOEMS) resonator gyroscope based on a
waveguide micro-ring resonator was proposed. This sensor was operated by measuring the …

This review reports an overview and development of micro-gyroscope. The review first
presents different types of micro-gyroscopes. Micro-gyroscopes in this review are …

Gyroscopes are the inertial measurement devices, which are used to detect angular rotation
rate of the objects. which are widely used for guidance, navigation, airplanes, spacecrafts …

In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS)
gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS …

A planar micro-machined tri-axis gyroscope in decoupled-mode mechanical structure is
presented, verified for superior detection capability and analyzed by experiments in this …

In this paper, a tuning fork gyroscope with a polygon-shaped vibration beam is proposed.
The vibration structure of the gyroscope consists of a polygon-shaped vibration beam, two …

The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in
recent years. It is different from the traditional mechanical rotor gyroscope in that it …