Wafer level integration of epitaxial piezoelectric thin films for novel NEMS, MEMS and MOEMS applications
M Dekkers, M Nguyen, N Hildebrand… - Advanced Materials …, 2017 - sintef.brage.unit.no
Pb (Zr, Ti) O3 (PZT) and (PhMg1/3Nb2/3O3) 2/3-CPbTiO3) 1/3 (PMN-PT) thin films are
epitaxially deposited on 200 mm wafers using Solmates' Pulsed Laser Deposition (PLD) …
epitaxially deposited on 200 mm wafers using Solmates' Pulsed Laser Deposition (PLD) …
Fabrication and characterization of large figure-of-merit epitaxial PMnN-PZT/Si transducer for piezoelectric MEMS sensors
This paper reports a highly c-axis oriented 0.06 Pb (Mn 1/3, Nb 2/3) O 3-0.94 Pb (Zr 0.5, Ti
0.5) O 3 (PMnN-PZT) epitaxial thin film sputter-deposited on a Si substrate for MEMS …
0.5) O 3 (PMnN-PZT) epitaxial thin film sputter-deposited on a Si substrate for MEMS …
High performance LaNiO3-buffered,(001)-oriented PZT piezoelectric films integrated on (111) Si
Y Wang, J Ouyang, H Cheng, Y Shi… - Applied Physics …, 2022 - pubs.aip.org
Integration of high-performance lead zirconate titanate (PZT) piezoelectric films onto (111) Si
substrates is beneficial for the development of piezoelectric micro-electro-mechanical …
substrates is beneficial for the development of piezoelectric micro-electro-mechanical …
On the importance of the SrTiO3 template and the electronic contact layer for the integration of phase-pure low hysteretic Pb(Mg0.33Nb0.67)O3-PbTiO3 layers with …
The rapid advent of the piezoelectric microelectromechanical systems (PiezoMEMS) field
has created a tremendous demand for low hysteretic piezoelectric thin films on Si. In this …
has created a tremendous demand for low hysteretic piezoelectric thin films on Si. In this …
[PDF][PDF] Optimization of pulsed laser deposited piezoelectric thin films for microelectromechanical systems
DR Kearney - 2013 - ir.library.oregonstate.edu
Lead zirconate titanate (PZT) is well known to exhibit some of the strongest piezoelectric
responses, explaining why it is at the heart of piezoelectric-based microelectromechanical …
responses, explaining why it is at the heart of piezoelectric-based microelectromechanical …
Integration of epitaxial piezoelectric thin films on silicon
S Yin - 2013 - theses.hal.science
Recently, piezoelectric materials, like lead titanate zirconate Pb (ZrxTi1-x) O3 (PZT), zinc
oxide ZnO, and the solid solution Pb (Mg1/3Nb2/3) O3-PbTiO3 (PMN-PT), increasingly …
oxide ZnO, and the solid solution Pb (Mg1/3Nb2/3) O3-PbTiO3 (PMN-PT), increasingly …
Development of perovskite thin films for use in piezoelectric based microelectromechanical systems
CT Shelton - 2009 - ir.library.oregonstate.edu
The lead-zirconate-titanate (PZT) solid solution system is currently the workhorse of
piezoelectric-based microelectromechanical systems (MEMS) research. Among bulk …
piezoelectric-based microelectromechanical systems (MEMS) research. Among bulk …
Thin-film piezoelectric MEMS
CB Eom, S Trolier-McKinstry - Mrs Bulletin, 2012 - cambridge.org
Major challenges have emerged as microelectromechanical systems (MEMS) move to
smaller size and increased integration density, while requiring fast response and large …
smaller size and increased integration density, while requiring fast response and large …
Sm-doped Pb(Mg1/3, Nb2/3)O3-PbTiO3 Sputter-Epitaxy on Si Towards Giant-Piezoelectric Thin Film for Mems
X Qi, S Yoshida, S Tanaka - 2021 IEEE 34th International …, 2021 - ieeexplore.ieee.org
Pb (Zr, Ti) O 3 (PZT) has been the most widely utilized in piezoelectric Micro Electro
Mechanical Systems (MEMS) actuator. However, the improvement of its piezoelectricity has …
Mechanical Systems (MEMS) actuator. However, the improvement of its piezoelectricity has …
Low thermal budget lead zirconate titanate thick films integrated on Si for piezo-MEMS applications
Y Wang, J Yan, H Cheng, N Chen, P Yan… - Microelectronic …, 2020 - Elsevier
Piezoelectric cantilevers made from ferroelectric thick films are commonly used as key
components in many prototypical piezo-MEMS devices, including sensors, micro-actuators …
components in many prototypical piezo-MEMS devices, including sensors, micro-actuators …