Controlled uniform growth of GaInAsP/InP structures for laser application on 2 inch wafers by LP-MOVPE at 20 mbar

R Meyer, D Grützmacher, H Jürgensen, P Balk - Journal of Crystal Growth, 1988 - Elsevier
This paper reports on the large area growth of GaInAsP/InP structures for 1.3 and 1.55 μm
applications in a LP-MOVPE system at 20 mbar, at conditions comparable to those used for …

Large-and selective-area LP-MOVPE growth of InGaAsP-based bulk and QW layers under nitrogen atmosphere

H Roehle, H Schroeter-Janssen, R Kaiser - Journal of crystal growth, 1997 - Elsevier
Layer structures comprising InP and InGaAsP were compared when grown using nitrogen
versus hydrogen as carrier gas. Under nitrogen a remarkable improvement in layer …

Large area growth of extremely uniform AlGaAs/GaAs quantum well structures for laser applications by effective LP-MOVPE

D Schmitz, G Strauch, J Knauf, H Jürgensen… - Journal of Crystal …, 1988 - Elsevier
In a production-type LP-MOVPE system at a reactor pressure of 20 mbar, Al x Ga 1− x
As/GaAs structures (0< x< 0.7) have been grown on 2 inch wafers. X-ray and low …

MOVPE studies for the development of GaInAsP/InP lasers with semi-insulating InP blocking layers

P Speier, K Wunstel, FJ Tegude - Electronics Letters, 1987 - IET
The self-aligned selective regrowth of a GalnAsP/lnP BH laser with semi-insulating InP: Fe
by atmospheric-pressure MOVPE is reported. A threshold current of 26 mA and 12mW …

MOVPE in Ga In As P systems for opto-electronic applications

D Grützmacher, M Glade - Microelectronic engineering, 1992 - Elsevier
We have studied the capabilities of the growth of quantum well structures in the Ga In
As P material system by metalorganic vapor phase epitaxy (MOVPE) for optical …

Low pressure metalorganic chemical vapor deposition of InP and related compounds

M Razeghi, MA Poisson, JP Larivain… - Journal of Electronic …, 1983 - Springer
The low pressure metalorganic chemical vapor deposition epitaxial growth and
characterization of InP, Ga 0.47 In 0.53 As and Ga x In 1-x As y P 1-y, lattice-matched to InP …

GaInAs and GaInAsP materials grown by low pressure MOCVD for microwave and optoelectronic applications

JP Duchemin, JP Hirtz, M Razeghi, M Bonnet… - Journal of Crystal …, 1981 - Elsevier
The low pressure MOCVD technique has been successfully used to grow GaInAsP, lattice-
matched to InP, for the complete compositional range between InP (λ= 0.91 μm) and the …

Conditions for OMVPE growth of GaInAsP/InP crystal

S Sugou, A Kameyama, Y Miyamoto… - Japanese journal of …, 1984 - iopscience.iop.org
The conditions required for the growth of GaInAsP/InP by organometallic vapor-phase
epitaxy (OMVPE) covering the available bandgap wavelength of 1.3–1.6 µm were obtained …

Low-threshold 1.3 μm GaInAsP/InP lasers grown by atmospheric-pressure MOVPE

B Rose, P Devoldere, A Mircea, D Robein, M Trotte - Electronics Letters, 1985 - IET
Low-threshold 1.3 μm GaInAsP/InP lasers grown by atmospheric-pressure MOVPE Page 1
References 1 SNYDER, A. w., and LOVE, JD: 'Optical waveguide theory' (Chapman & Hall …

Selective-area low-pressure MOCVD of GaInAsP and related materials on planar InP substrates

M Gibbon, JP Stagg, CG Cureton… - Semiconductor …, 1993 - iopscience.iop.org
Low-pressure MOCVD has been used to grow layers of InP, InGaAs, GaInAsP and quantum
well material on planar substrates patterned with silica masks. The thicknesses and, where …