Vibrating polysilicon micromechanical ring resonators, using a unique extensional wine-
glass-mode shape to achieve lower impedance than previous UHF resonators, have been …

Vibrating polysilicon micromechanical ring resonators, utilizing a unique extensional wine-
glass mode shape to achieve lower impedance than previous UHF resonators, have been …

A vibrating micromechanical spoke-supported ring resonator employing a central peg-
anchor, balanced non-intrusive quarter-wavelength extensional support beams, and …

A vibrating polysilicon micromechanical" hollow-disk" ring resonator obtained by removing
quadrants of material from a solid disk resonator, but purposely leaving intact beams of …

A new fabrication methodology that allows self-alignment of a micromechanical structure to
its anchor (s) has been used to achieve vibrating radial-contour mode polysilicon …

A micromechanical, laterally vibrating disk resonator, fabricated via a technology combining
polysilicon surface-micromachining and metal electroplating to attain submicron lateral …

With Q's in the tens to hundreds of thousands, micromachined vibrating resonators are
proposed as integrated circuit-compatible tanks for use in the low phase-noise oscillators …

Microelectromechanical systems (MEMS), inspired by microelectronics and benefited from
the development of microfabrication technology, have been recently intensively researched …

Free-free-beam flexural-mode micromechanical resonators utilizing nonintrusive supports to
achieve measured Qs as high as 8400 at VHF frequencies from 30 to 90 MHz are …

In micromechanical resonators, energy loss via supports into the substrates may lead to a
low quality factor. To eliminate the support loss, in this paper a phononic band-gap structure …