Reliability is a critical characteristic of aerospace-grade components, particularly fast
steering mirror (FSM), which is one of the key devices in Free-Space laser communication …

A piezoelectric fast steering mirror (PFSM) is a complex, strong coupling nonlinear system
that integrates optics, mechanics, electrics, and control. Due to the existence of hysteresis …

This paper presents a control algorithm for a micro-electro-mechanical system (MEMS) fast
steering mirror (FSM), whose performance is poor in open loop control mode. Based on the …

This paper presents the design and evaluation of a high-bandwidth fast steering mirror
(FSM) driven by a piezoelectric actuator (PEA) for applications in the scanning systems. To …

One of the most prominent applications of piezoelectric materials is in
microelectromechanical systems (MEMS). A current challenge in piezo-MEMS is the …

This paper presents a 10mm piezoelectric MEMS fast steering mirror that integrates
piezoresistive sensors. The device is fabricated using an 8-inch CMOS-compatible process …

Piezoelectric ceramic (PZT) driver is a key component in PZT micro-displacement systems,
and the noise index determines the accuracy of the output displacement of the PTZ actuator …

Light detection and ranging (LiDAR) devices based on micro-electromechanical systems
(MEMS) micromirrors have been promising sensors for automatic driving due to the …

This paper presents the application and design of digital charge control (DCC) for reducing
nonlinearity in fast steering mirrors (FSMs) driven by piezoelectric actuators (PEAs). By …

This is the first reported work using FEM (finite element method) to predict metal MEMS
switch reliability operating under stress conditions for over decades. The lifetime of …