We present a nanoelectromechanical (NEM) relay that is capable of demonstrating two
stable states without on-hold power due to the influence of van der Waals force. This is …

By using complementary-metal-oxide-semiconductor processes, a silicon based bi-stable
nanoelectromechanical non-volatile memory is fabricated and characterized. The main …

Nanoelectromechanical relays are inherently radiation hard and can operate at high
temperatures. Thus, they have potential to serve as the building blocks in non-volatile …

Electrostatically actuated nanoelectromechanical (NEM) relays are integrated with silicon
nMOS devices. An nMOSFET successfully drives a NEM relay with the MOSFET serving as a …

Electromechanical relays exhibit inherently zero leakage and sharp hysteresis, which are
compelling for logic and memory applications. We present an overview of the nano-scale …

Laterally actuated polycrystalline silicon nanoelectromechanical (NEM) relays with
enhanced electrical properties are presented. Due to surface oxidation of polysilicon in room …

Emerging applications such as the Internet-of-Things and more-electric aircraft require
electronics with integrated data storage that can operate in extreme temperatures with high …

This paper proposes a cantilever-based nanoelectromechanical (NEM) nonvolatile memory
(NVM) with a novel write scheme for reliable memory operation at very high-operating …

A combined transmission electron microscopy-scanning tunneling microscopy (TEM-STM)
technique has been used to investigate the force interactions of silicon and germanium …

We present 4-terminal (4-T) silicon (Si) nanoelectron-mechanical (NEM) relays fabricated on
silicon-on-insulator (SOI) wafers. We demonstrate true 4-T switching behavior with isolated …