The development of a novel fully integrated microelectromechanical system (MEMS) for RF
purposes is presented. It is composed of a paddle polysilicon micro-resonator …

This paper focuses on the design, fabrication and characterization of polysilicon
microresonators monolithically integrated in a CMOS standard technology (AMS 0.35 mum) …

A bridge-shaped first-lateral-mode 60-MHz mechanical resonator, which is monolithically
integrated with capacitive CMOS readout electronics, is presented. The resonator is …

Integration of electrostatically driven and capacitively transduced MEMS resonators in
commercial CMOS technologies is discussed. A figure of merit to study the performance of …

This paper reports on the design and implementation of a low power MEMS oscillator based
on capacitively transduced silicon micromachined resonators. The analysis shows how …

The fabrication of a microelectromechanical resonator using the commercial 0.35 μm
complementary metal oxide semiconductor (CMOS) process and a post-process has been …

16MHz and 91MHz micromechanical resonators based on the Resonant Suspended-gate
MOSFET (RSG-MOSFET) architecture are demonstrated. A fabrication process using a …

This paper demonstrates the feasibility of a novel fabrication approach of MEMS resonators
above standard CMOS circuitry and with zero-level vacuum package. As a proof of concept …

CMOS-MEMS resonators have become a promising solution thanks to their miniaturization
and on-chip integration capabilities. However, using a CMOS technology to fabricate …

The very significant growth of the wireless communication industry has spawned
tremendous interest in the development of high performance radio frequencies (RF) …