(57) ABSTRACT A method of manufacturing a semiconductor optical device including a
semiconductor layer includes: forming a semi conductor layer, forming a first dielectric film …

A method for manufacturing a semiconductor includes: a first step of forming an etching stop
layer on a first semiconductor layer; and a second step of forming a second semiconductor …

A method of manufacturing a semiconductor device including a semiconductor layer and a
dielectric layer deposited on the semiconductor layer, including: forming the semiconductor …

(54) METHOD OF MANUFACTURING(30) Foreign Application Priority Data
SEMICONDUCTOR LASER DEVICE, SEMCONDUCTOR LASER DEVICE AND Jan. 26 …

A semiconductor optical element includes a semiconductor layer portion that includes an
optical waveguide layer. The semiconductor layer portion contains a first impurity having a …

A method for manufacturing a semiconductor laser apparatus according to a first aspect of
the present invention includes steps of forming a first semiconductor laser device having a …

(57) ABSTRACT A method for manufacturing a semiconductor optical device includes the
steps of growing a stacked layer including lower and upper core layers, a first upper region …

(57) ABSTRACT A semiconductor optical device includes: a first conductive type
semiconductor layer; an active layer; a second conduc tive type semiconductor layer …

An optical element includes a Surface-emitting type semi conductor laser, a photodetector
element that detects a part of laser light emitted from the Surface-emitting type semi …

A method for producing a semiconductor optical device includes the steps of forming a
semiconductor region including a ridge structure on a substrate; forming an insulating film …