Micro-and nanopositioning is one of the key problems in the field of nanoscience and
nanotechnology. Adjustment, displacement, and rotation with nanometer accuracy is desired …

We present a completely practical TunaDrive piezo motor. It consists of a central piezo stack
sandwiched by two arm piezo stacks and two leg piezo stacks, respectively, which is then …

An inertial piezoelectric step drive for subnanosize-accuracy movements | Instruments and
Experimental Techniques Skip to main content SpringerLink Account Menu Find a journal …

Many application areas require ultraprecise, stiff, and compact actuator systems with a high
positioning resolution in combination with a large range as well as a high holding and …

We present a novel piezoelectric stepper motor featuring high compactness, rigidity,
simplicity, and any direction operability. Although tested in room temperature, it is believed …

We present a novel simple piezoelectric nanopositioner which just has one piezoelectric
scanner tube (PST) and one driving signal, using two short quartz rods and one BeCu spring …

A new, vacuum compatible piezo‐driven rotation device (piezo‐rotor) based on inertial
sliding has been developed. The piezo‐rotor has one degree of freedom, nanoradial …

The principle of inertial sliding of a platform on a periodically accelerated support is
exploited for the design of a piezoelectric fine‐positioning device. The device provides step …

We report on the development of a metrological multiaxis nanopositioning device, which is
operated by the piezo-based inertial method, as a sample stage for scanning probe …

The piezoelectric stick-slip (PZT-SS) actuator is known to achieve motion with a theoretically
unlimited range yet high resolution (several nanometers). In this type of actuator, friction …