[图书][B] Microsystem design

SD Senturia - 2005 - books.google.com
It is a real pleasure to write the Foreword for this book, both because I have known and
respected its author for many years and because I expect this book's publication will mark an …

[图书][B] Introduction to microsystem design

WK Schomburg - 2015 - books.google.com
This book systematically describes the design options for micro systems as well as the
equations needed for calculating the behavior of their basic elements. The fundamental …

[图书][B] Introduction to microsystem technology: a guide for students

G Gerlach, W Dotzel - 2008 - books.google.com
Over half a century after the discovery of the piezoresistive effect, microsystem technology
has experienced considerable developments. Expanding the opportunities of …

[图书][B] Microsystem technology and microrobotics

S Fatikow, U Rembold - 2013 - books.google.com
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical,
electronic, optical, and other components on a substrate to construct functional devices …

[图书][B] MEMS and microsystems: design, manufacture, and nanoscale engineering

TR Hsu - 2008 - books.google.com
Technology/Engineering/Mechanical A bestselling MEMS text... now better than ever. An
engineering design approach to Microelectromechanical Systems, MEMS and Microsystems …

Microfabrication techniques for integrated sensors and microsystems

KD Wise, K Najafi - Science, 1991 - science.org
Integrated sensors and actuators are rapidly evolving to provide an important link between
very large scale integrated circuits and nonelectronic monitoring and control applications …

Integrated sensors, MEMS, and microsystems: Reflections on a fantastic voyage

KD Wise - Sensors and Actuators A: Physical, 2007 - Elsevier
The past 40 years have seen integrated sensors move from the first micromachined silicon
devices to wireless integrated microsystems that combine high-performance batch …

[图书][B] Microsensors, MEMS, and smart devices

JW Gardner, VK Varadan, OO Awadelkarim - 2003 - dl.acm.org
From the Publisher: Microsensors and MEMS (micro-electro-mechanical systems) are
revolutionising the semiconductor industry. A microsystem or the so-called" system-on-a …

[图书][B] Smart material systems and MEMS: design and development methodologies

VK Varadan, KJ Vinoy, S Gopalakrishnan - 2006 - books.google.com
Presenting unified coverage of the design and modeling of smart micro-and macrosystems,
this book addresses fabrication issues and outlines the challenges faced by engineers …

Introductory Mems

TM Adams, RA Layton - Fabrication and, 2010 - Springer
Things, but, apart from being perhaps too playful a title, we didn't like the word “big” in it.
That's because the book was intended to be an introduction to the world of science and …