Confined chemical etching for electrochemical machining with nanoscale accuracy

D Zhan, L Han, J Zhang, K Shi, JZ Zhou… - Accounts of Chemical …, 2016 - ACS Publications
Conspectus In the past several decades, electrochemical machining (ECM) has enjoyed the
reputation of a powerful technique in the manufacturing industry. Conventional ECM …

Confined Etchant Layer Technique: An Electrochemical Approach to Micro-/Nanomachining

L Han, H Xu, K Shi, JZ Zhou, FZ Yang… - The Journal of …, 2023 - ACS Publications
Historically electrochemistry plays an important role in the machinery processing industry,
especially for hard-to-machine materials and profiled structures. Nowadays, the challenge …

Electrochemical nanomachining

L Han, MM Sartin, ZQ Tian, D Zhan, ZW Tian - Current Opinion in …, 2020 - Elsevier
Free of tool wear, residual stress, and surface damage, electrochemical nanomachining
(ECNM) plays an irreplaceable role in advanced manufacturing, via the production of ultra …

Chemical etching processes at the dynamic GaAs/Electrolyte interface in the electrochemical direct-writing micromachining

L Han, Y Wang, MM Sartin, D Zhan… - ACS Applied Electronic …, 2021 - ACS Publications
Electrochemical fabrication of functional three-dimensional micro/nanostructures (3D-MNSs)
at the wafer scale is important in the semiconductor industry, but it involves complex …

Electrochemical micro/nano-machining: principles and practices

D Zhan, L Han, J Zhang, Q He, ZW Tian… - Chemical Society …, 2017 - pubs.rsc.org
Micro/nano-machining (MNM) is becoming the cutting-edge of high-tech manufacturing
because of the increasing industrial demand for supersmooth surfaces and functional three …

Electrochemical mechanical micromachining based on confined etchant layer technique

Y Yuan, L Han, J Zhang, J Jia, X Zhao, Y Cao… - Faraday …, 2013 - pubs.rsc.org
The confined etchant layer technique (CELT) has been proved an effective electrochemical
microfabrication method since its first publication at Faraday Discussions in 1992. Recently …

Distance effects in electrochemical micromachining

L Xu, Y Pan, C Zhao - Scientific reports, 2016 - nature.com
Considering exponential dependence of currents on double-layer voltage and the feedback
effect of the electrolyte resistance, a distance effect in electrochemical micromachining is …

Direct nanomachining on semiconductor wafer by scanning electrochemical microscopy

L Han, Z Hu, MM Sartin, X Wang, X Zhao… - Angewandte Chemie …, 2020 - Wiley Online Library
Scanning electrochemical microscopy (SECM) is one of the most important instrumental
methods of modern electrochemistry due to its high spatial and temporal resolution. We …

High precision electrochemical micromachining based on confined etchant layer technique

LJ Lai, H Zhou, YJ Du, J Zhang, JC Jia, LM Jiang… - Electrochemistry …, 2013 - Elsevier
High-quality products come from high-quality instrument. We present here an optimized
instrument for electrochemical micromachining, in which a granite bridge base, a macro …

Three-dimensional micro-fabrication on copper and nickel

LM Jiang, ZF Liu, J Tang, L Zhang, K Shi… - Journal of …, 2005 - Elsevier
Three-dimensional microstructures were fabricated and duplicated on copper and nickel
substrates, respectively, using a confined etchant layer technique (CELT). The key feature of …