Silicon‐Micromachined Gas Chromatographic Columns for the Development of Portable Detection Device

JB Sanchez, A Schmitt, F Berger, C Mavon - Journal of Sensors, 2010 - Wiley Online Library
We report the fabrication of a gas chromatographic column module integrated on a silicon
substrate and usable as a portable measurement device dedicated to the selective detection …

Review on micro-gas analyzer systems: Feasibility, separations and applications

E Lussac, R Barattin, P Cardinael… - Critical reviews in …, 2016 - Taylor & Francis
Over 30 years, portable systems for fast and reliable gas analysis are at the core of both
academic and industrial research. Miniaturized systems can be helpful in several domains …

Selectivity enhancement of metal oxide gas sensors using a micromachined gas chromatographic column

S Zampolli, I Elmi, J Stürmann, S Nicoletti, L Dori… - Sensors and Actuators B …, 2005 - Elsevier
Indoor air quality monitoring applications require both high sensitivity and selectivity, which
are difficult to reach with solid state gas sensors. While for some gas species like, eg CO and …

Silicon-micromachined separation columns coated with amino acid films for an integrated on-chip gas chromatograph

S Hannoe, I Sugimoto, T Katoh - … Analysis Systems' 98: Proceedings of the …, 1998 - Springer
A small column (micro-column) has been fabricated on-chip that can contribute to
development of a miniature gas Chromatograph for mobile and multi-point atmospheric …

A selective gas detection micro-device for monitoring the volatile organic compounds pollution

JB Sanchez, F Berger, M Fromm, MH Nadal - Sensors and Actuators B …, 2006 - Elsevier
The discrimination of various chemical compounds is generally impossible by using a single
tin dioxide-based gas sensor. This research is focused on the development of a hybrid micro …

An all electronic, fully microfabricated micro gas chromatograph

Y Qin, YB Gianchandani - 2015 Transducers-2015 18th …, 2015 - ieeexplore.ieee.org
This paper reports a full micro gas chromatograph (µGC) in which all the components are
electronic. All components, including a Knudsen pump, a preconcentrator, separation …

Novel stationary phase for silicon gas chromatography microcolumns

F Ricoul, D Lefebvre, A Bellemin-Comte… - SENSORS, 2014 …, 2014 - ieeexplore.ieee.org
This paper presents the implementation for the first time of a porous SiOCH thin layer as
stationary phase for silicon microcolumns for gas chromatography (GC). Deposition of the …

The effect of microcolumn geometry on the performance of micro-gas chromatography columns for chip scale gas analyzers

AD Radadia, A Salehi-Khojin, RI Masel… - Sensors and Actuators B …, 2010 - Elsevier
Many microfabricated gas chromatography (micro-GC) column designs have been reported
so far, but it is unclear how microcolumn design affects separation performance in the typical …

Development of a gas detection micro-device for hydrogen fluoride vapours

JB Sanchez, F Berger, W Daniau, P Blind… - Sensors and Actuators B …, 2006 - Elsevier
This research concentrates on the sensitivity of a tin dioxide-based gas sensor
semiconductor with respect to hydrogen fluoride in the atmosphere. This paper is focused on …

Porous silica monolithic polymers for micromachined gas chromatography columns: A featured phase for fast and efficient separations of light compounds mixtures

I Azzouz, D Lerari, K Bachari - IEEE Sensors Journal, 2020 - ieeexplore.ieee.org
Since the late 1970s, approaches have been proposed to replace conventional gas
chromatography apparatus with silicon-based microfabricated separation systems …