A micromechanical, laterally vibrating disk resonator, fabricated via a technology combining
polysilicon surface-micromachining and metal electroplating to attain submicron lateral …

A micromechanical, laterally vibrating disk resonator, fabricated via a technology that
combines polysilicon surface-micromachining and metal electroplating to attain submicron …

A new fabrication methodology that allows self-alignment of a micromechanical structure to
its anchor (s) has been used to achieve vibrating radial-contour mode polysilicon …

A new fabrication methodology that allows self-alignment of a micromechanical structure to
its anchor (s) has been utilized to achieve vibrating radial-contour mode micromechanical …

A vibrating polysilicon micromechanical" hollow-disk" ring resonator obtained by removing
quadrants of material from a solid disk resonator, but purposely leaving intact beams of …

An IC-compatible, high frequency (HF), lateral micromechanical resonator supported by a
mechanical structure designed to introduce stresses that counteract temperature-induced …

Free-free-beam flexural-mode micromechanical resonators utilizing nonintrusive supports to
achieve measured Qs as high as 8400 at VHF frequencies from 30 to 90 MHz are …

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …

Substantial reductions in vibrating micromechanical resonator series motional resistance R
x have been attained by mechanically coupling and exciting a parallel array of corner …

The mechanism behind third order intermodulation distortion (IM/sub 3/) in capacitively
driven clamped-clamped beam micromechanical (" CC-beam/spl mu/mechanical") …