Following existing trends in microelectronic engineering scanning force microscope test
systems have been developed as a tool for sub micron device characterisation. Performance …

A new sampling electrostatic force microscopy technique for non-invasive measurement of
microelectronic circuits is presented. The technique utilises a pulsewidth modulated …

A scanning force microscope tester has shown its operational capability in device internal
electrical potentials measurements with both submicron and gigahertz resolution [1]. In this …

This article presents a sampling electrostatic force microscopy technique for high frequency
integrated circuit internal measurement that utilizes a pulse width modulation method. The …

Background: The resolution in electrostatic force microscopy (EFM), a descendant of atomic
force microscopy (AFM), has reached nanometre dimensions, necessary to investigate …

A new contactless device internal test technique based on a scanning force microscope is
presented, enabling electrical characterization of integrated circuits (ICs) with both high …

Two-dimensional electrostatic finite element modeling is used to estimate the variation of tip
force as a function of potential, dielectric film thickness, and tip–substrate spacing when …

A scanning force microscope can be used to measure a device's internal electrical potential
with high spatial and temporal resolution. We present experimental results taken with a …

Dynamic mode electrostatic force microscopy is a technique capable of measuring the
internal voltage signals of high-speed integrated circuits. Circuit signals are extracted by …

The current state of art of electrostatic force microscopy is described in the paper. The
principle of electrostatic force operation enabling one to analyse local voltage distribution …