Scanning voltage microscopy on active semiconductor lasers: The impact of doping profile near an epitaxial growth interface on series resistance

D Ban, EH Sargent, DW St J, K Hinzer… - IEEE journal of …, 2004 - ieeexplore.ieee.org
We apply scanning voltage microscopy to actively biased multiquantum-well ridge-
waveguide semiconductor lasers. We localize the source of a major and hitherto …

Determination of spatial resolution in atomic-force-microscopy-based electrical characterization techniques using quantum well structures

O Douheret, S Bonsels, S Anand - … of Vacuum Science & Technology B …, 2005 - pubs.aip.org
In this work, a procedure to determine the spatial resolution in scanning capacitance (SCM)
and scanning spreading resistance microscopy (SSRM) is proposed and demonstrated. It is …

Electrostatic force microscopy: principles and some applications to semiconductors

P Girard - Nanotechnology, 2001 - iopscience.iop.org
The current state of the art of electrostatic force microscopy (EFM) is presented. The
principles of EFM operation and the interpretation of the obtained local voltage and …

In situ treatment of a scanning gate microscopy tip

AE Gildemeister, T Ihn, M Sigrist, K Ensslin… - Applied physics …, 2007 - pubs.aip.org
In scanning gate microscopy, where the tip of a scanning force microscope is used as a
movable gate to study electronic transport in nanostructures, the shape and magnitude of …

Probing semiconductor technology and devices with scanning spreading resistance microscopy

P Eyben, W Vandervorst, D Alvarez, M Xu… - … Phenomena at the …, 2007 - Springer
As the downscaling in semiconductor industry continues, the correct operation of devices
becomes critically dependent on the precise location and activation of the dopants in two …

Advances in AFM for the electrical characterization of semiconductors

RA Oliver - Reports on Progress in Physics, 2008 - iopscience.iop.org
Atomic force microscopy (AFM) is a key tool for nanotechnology research and finds its
principal application in the determination of surface topography. However, the use of the …

Nanoscale quantitative measurement of the potential of charged nanostructures by electrostatic and Kelvin probe force microscopy: unraveling electronic processes in …

A Liscio, V Palermo, P Samori - Accounts of chemical research, 2010 - ACS Publications
In microelectronics and biology, many fundamental processes involve the exchange of
charges between small objects, such as nanocrystals in photovoltaic blends or individual …

Conductive atomic-force microscopy investigation of nanostructures in microelectronics

C Teichert, I Beinik - Scanning Probe Microscopy in Nanoscience and …, 2010 - Springer
Conductive atomic-force microscopy (C-AFM), where a conductive, biased probe is scanned
in contact mode across the surface under investigation is one of the most prominent …

Nanoscale impedance microscopy-a characterization tool for nanoelectronic devices and circuits

LSC Pingree, EF Martin, KR Shull… - IEEE transactions on …, 2005 - ieeexplore.ieee.org
A recently developed conductive atomic force microscopy (cAFM) technique, nanoscale
impedance microscopy (NIM), is presented as a characterization strategy for nanoelectronic …

Scanning capacitance microscopy and spectroscopy applied to local charge modifications and characterization of nitride-oxide-silicon heterostructures

M Dreyer, R Wiesendanger - Applied Physics A, 1995 - Springer
We have combined a home-built capacitance sensor with a commercial scanning force
microscope to obtain a Scanning Capacitance Microscope (SCM). The SCM has been used …