The invention of scanning tunneling microscopy (STM), rapidly followed by atomic force
microscopy (AFM), occurred at the time when extensive research on sub-µm metal oxide …

This paper gives an overview of established methods and new developments in the field of
Scanning Probe Microscopy (SPM) of functional films and semiconductor devices. It focuses …

The spatial resolution, sensitivity, and accuracy required for electrical characterization of
device structures in the semiconductor industry suggest that scanning probe microscopy …

The Electrostatic Force Microscope (EFM) and the related Scanning Kelvin Force
Microscope (SKFM) are of interest for the measurement of potential distributions within …

Kelvin probe force microscopy (KPFM) is used to investigate the electrostatic force between
a conductive probe and doped semiconductors. The observed frequency dependence of the …

Electrical scanning probe microscopies (SPM) use ultrasharp metallic tips to obtain
nanometer spatial resolution and are a key tool for characterizing nanoscale …

Scanning capacitance microscopy (SCM) is based on a contact-mode variant of atomic force
microscopy, which is used for imaging two-dimensional carrier (electrons and holes) …

Conductive atomic force microscopy (CAFM) has become the preferred tool of many
companies and academics to analyze the electronic properties of materials and devices at …

114 I. Optical Microscopy, Scanning Probe Microscopy, Ion Microscopy and Nanofabrication
of AFM, as characterization technique, is further increasing with recent developments in …

The maturation of scanning probe microscopy (5PM) has yielded an analytical instrument
with a wide range of capabilities and applications. The instrument's ability to perform ultra …