Electrostatic force microscopy and potentiometry of realistic nanostructured systems

M Lucchesi, G Privitera, M Labardi… - Journal of Applied …, 2009 - pubs.aip.org
We investigate the dependency of electrostatic interaction forces on applied potentials in
electrostatic force microscopy (EFM) as well as in related local potentiometry techniques …

[引用][C] Voltage contrast in submicron integrated circuits by scanning force microscopy

C Böhm, J Sprengepiel, M Otterbeck… - Journal of Vacuum …, 1996 - pubs.aip.org
A scanning force microscope can be used to measure a device's internal electrical potential
with high spatial and temporal resolution. We present experimental results taken with a …

Charge carrier recombination and generation analysis in materials and devices by electron and optical beam microscopy

A Cavallini, L Polenta, A Castaldini - Microelectronics Reliability, 2010 - Elsevier
Electron beam induced current (EBIC) and optical beam induced current (OBIC) methods of
scanning microscopy are here described in view of their applications in the analysis of …

Scanning probe microscopy for 2-D semiconductor dopant profiling and device failure analysis

AK Henning, T Hochwitz - Materials Science and Engineering: B, 1996 - Elsevier
We have extended the capabilities of an atomic force microscope (AFM) with double
heterodyne force detection, to include both electrostatic force microscopy (EFM) and …

On the reliability of scanning probe based electrostatic force measurements

M Ratzke, J Reif - Microelectronic engineering, 2007 - Elsevier
The dimensions of semiconductor devices rapidly decreasing, the detection and control of
spatial inhomogeneities of material properties on a sub-μm scale becomes essential. For …

Development of a conductive atomic force microscope with a logarithmic current-to-voltage converter for the study of metal oxide semiconductor gate dielectrics …

L Aguilera, M Lanza, A Bayerl, M Porti… - Journal of Vacuum …, 2009 - pubs.aip.org
A new configuration of conductive atomic force microscope (CAFM) is presented, which is
based in a conventional AFM with a logarithmic current-to-voltage (log IV⁠) amplifier. While …

Measuring and modifying the electric surface potential distribution on a nanometre scale: a powerful tool in science and technology

HO Jacobs, A Stemmer - … An International Journal devoted to the …, 1999 - Wiley Online Library
The combination of atomic force microscopy (AFM) and Kelvin probe technology is a
powerful tool to obtain high-resolution maps of the electric surface potential distribution on …

Electrical modes in scanning probe microscopy

R Berger, HJ Butt, MB Retschke… - Macromolecular rapid …, 2009 - Wiley Online Library
Scanning probe microscopy methods allow the investigation of a variety of sample surface
properties on a nanometer scale, even down to single molecules. As molecular electronics …

Potential imaging of operating light-emitting devices using Kelvin force microscopy

R Shikler, T Meoded, N Fried, Y Rosenwaks - Applied physics letters, 1999 - pubs.aip.org
We report on the measurements of two-dimensional potential distribution with nanometer
spatial resolution of operating light-emitting diodes. By measuring the contact potential …

Emerging scanning probe–based setups for advanced nanoelectronic research

F Hui, C Wen, S Chen, E Koren… - Advanced Functional …, 2020 - Wiley Online Library
Scanning probe microscopy (SPM) refers to a family of techniques that have become
essential to study many different properties of materials and devices at the nanoscale. All of …