Scanning force microscopy of semiconductor materials and devices

LJ Balk, M Maywald - Materials Science and Engineering: B, 1994 - Elsevier
Tip microscopy techniques have become very widely spread methods of scanning imaging
of microstructures or nanostructures in almost any material problem. This applies both to …

Integration of a fabrication process for an aluminum single-electron transistor and a scanning force probe for tuning-fork-based probe microscopy

K Suter, T Akiyama, NF De Rooij… - Journal of …, 2010 - ieeexplore.ieee.org
In this paper, we report on the integration technique and fabrication of a scanning probe
interrogating the location of charges and their tracks inside quantum devices. Our unique …

Characterization of quantum wells by cross-sectional Kelvin probe force microscopy

O Douheret, S Anand, T Glatzel, K Maknys… - Applied physics …, 2004 - pubs.aip.org
Cross-sectional Kelvin probe force microscopy (KPFM) in ultrahigh vacuum is used to
characterize the electronic structure of InGaAs/InP quantum wells. The KPFM signal shows …

Correlated and in-situ electrical transmission electron microscopy studies and related membrane-chip fabrication

M Spies, ZS Momtaz, J Lähnemann, MA Luong… - …, 2020 - iopscience.iop.org
Understanding the interplay between the structure, composition and opto-electronic
properties of semiconductor nano-objects requires combining transmission electron …

Advancing characterization of materials with atomic force microscopy-based electric techniques

S Magonov, J Alexander, S Wu - Scanning Probe Microscopy of …, 2010 - Springer
Multifrequency measurements in atomic force microscopy (AFM) are one of the main
techniques advancing this method. Detection of the AFM probe response at different …

Tunneling/shear force microscopy using piezoelectric tuning forks for characterization of topography and local electric surface properties

MŁ Woszczyna, P Zawierucha, A Masalska, G Jóźwiak… - Ultramicroscopy, 2010 - Elsevier
Characterization of novel nanoelectronic structures and materials requires advanced and
high-resolution diagnostic methods. In this article new approach for high sensitivity …

Bias-induced junction displacements in scanning spreading resistance microscopy and scanning capacitance microscopy

P Eyben, N Duhayon, T Clarysse… - Journal of Vacuum …, 2003 - pubs.aip.org
Scanning capacitance microscopy (SCM) and scanning spreading resistance microscopy
(SSRM) are both valuable tools for analyzing the two-dimensional carrier distribution in …

[HTML][HTML] Complete information acquisition in dynamic force microscopy

A Belianinov, SV Kalinin, S Jesse - Nature communications, 2015 - nature.com
Scanning probe microscopy has emerged as a primary tool for exploring and controlling the
nanoworld. A critical part of scanning probe measurements is the information transfer from …

Fabrication and electric measurements of nanostructures inside transmission electron microscope

Q Chen, LM Peng - Ultramicroscopy, 2011 - Elsevier
Using manipulation holders specially designed for transmission electron microscope (TEM),
nanostructures can be characterized, measured, modified and even fabricated in-situ. In-situ …

[HTML][HTML] Know your full potential: Quantitative Kelvin probe force microscopy on nanoscale electrical devices

A Axt, IM Hermes, VW Bergmann… - Beilstein journal of …, 2018 - beilstein-journals.org
In this study we investigate the influence of the operation method in Kelvin probe force
microscopy (KPFM) on the measured potential distribution. KPFM is widely used to map the …