The accurate determination of biological parameters by means of rapid, on-line
measurements at low-concentrations is an important task within the fields of pharmaceutical …

We report the fabrication of a gas chromatographic column module integrated on a silicon
substrate and usable as a portable measurement device dedicated to the selective detection …

For an example of a silicon-based micromachined analyzer, we describe a combined PO2,
PCO2, and pH sensor designed for extracorporeal blood gas monitoring. The clinically well …

We present the design and integration of a nine-pH microsensor array on a single silicon
substrate with its own signal readout circuit, integrated in a 0.6-μm commercial standard …

Indoor air quality monitoring applications require both high sensitivity and selectivity, which
are difficult to reach with solid state gas sensors. While for some gas species like, eg CO and …

A miniature gas analysis system has been built based on the principles of gas
chromatography (GC). The major components are fabricated in silicon using …

This article presents a novel architecture of an ISFET sensor interface circuit, monolithically
integrated on a 3D MCM, part of a biomedical microsystem. It is a differential configuration …

This research concentrates on the sensitivity of a tin dioxide-based gas sensor
semiconductor with respect to hydrogen fluoride in the atmosphere. This paper is focused on …

In this paper we review developments in the last decade towards making silicon-based gas
sensors and smart sensor systems. A range of different transduction principles is considered …

This paper describes the design and fabrication techniques of micro capillary columns as
the main components in a microengineered gas chromatography system. The system is to …