Silicon microfabrication based particulate matter sensor

M Dong, E Iervolino, F Santagata, G Zhang… - Sensors and Actuators A …, 2016 - Elsevier
With the increasing public awareness of the impact of particulate matter (PM) on human
health, real-time monitoring of PM exposure level has attracted more interest than ever …

Microflow devices for miniaturized chemical analysis systems

S Buettgenbach, C Robohm - Chemical Microsensors and …, 1998 - spiedigitallibrary.org
In the development of chemical analysis systems a clear trend exists towards miniaturization
using silicon micromachining. This paper reports on microflow devices such as microvalves …

A facile, standardized fabrication approach and scalable architecture for a micro gas chromatography system with integrated pump

Y Qin, YB Gianchandani - 2013 Transducers & Eurosensors …, 2013 - ieeexplore.ieee.org
This paper reports a micro gas chromatography (μGC) system that includes a
microfabricated Knudsen pump, preconcentrator, separation column, and discharge-based …

A micro-discharge photoionization detector for micro-gas chromatography

S Narayanan, G Rice, M Agah - Microchimica Acta, 2014 - Springer
We report on a small (20× 10 mm) micromachined device for the detection of gases in micro-
gas chromatography (GC). It incorporates a micro-discharge across a 20-μm gap, and a …

Novel Concepts for Silicon‐Based Biosensors

MJ Schöning, H Lüth - physica status solidi (a), 2001 - Wiley Online Library
Microfabricated semiconductor devices are becoming increasingly relevant also for (bio‐)
chemical sensors. The techniques will have a crucial impact in application fields such as …

Paving the way for a green transition in the design of sensors and biosensors for the detection of volatile organic compounds (VOCs)

CM Cova, E Rincón, E Espinosa, L Serrano, A Zuliani - Biosensors, 2022 - mdpi.com
The efficient and selective detection of volatile organic compounds (VOCs) provides key
information for various purposes ranging from the toxicological analysis of indoor/outdoor …

Multi-chamber PCR chip with simple liquid introduction utilizing the gas permeability of polydimethylsiloxane

NB Trung, M Saito, H Takabayashi, PH Viet… - Sensors and Actuators B …, 2010 - Elsevier
On-chip polymerase chain reaction (PCR) is beginning to provide a viable alternative to
conventional genetic profiling and amplification devices through minimal reagent use, short …

A smartphone biosensor based on analysing structural colour of porous silicon

T Cao, Y Zhao, CA Nattoo, R Layouni, SM Weiss - Analyst, 2019 - pubs.rsc.org
We report a smartphone compatible, low-cost porous silicon biosensor, which correlates the
structural colour of a porous silicon microcavity (PSiM) to spectral peak position. Molecules …

Microfabrication and microsensors

S Shoji, M Esashi - Applied biochemistry and biotechnology, 1993 - Springer
In order to fabricate microsensors, a micromachining, microfabrication technique based on
LSI technologies has been used. In this paper, useful micromachining techniques are …

Multisensory gas chromatography for field analysis of complex gaseous mixtures

V Dobrokhotov, A Larin - ChemEngineering, 2019 - mdpi.com
A novel approach to analysis of complex gaseous mixtures is presented. The approach is
based on the utilization of a compact gas chromatograph in combination with an array of …