Radio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signals from DC to microwave …
C Durand, F Casset, P Ancey, F Judong, A Talbot… - Microsystem …, 2008 - Springer
The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performance radio frequencies (RF) …
Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or …
T Purtova, H Schumacher - Handbook of mems for wireless and mobile …, 2013 - Elsevier
This chapter presents an introduction to radio frequency microelectromechanical systems (RF MEMS) technologies for wireless applications. It starts with reviewing the operation …
JJ Yao - Journal of micromechanics and microengineering, 2000 - iopscience.iop.org
This paper reviews the recent progress in MEMS for radio frequency (RF) applications from a device perspective. RF MEMS devices reviewed include switches and relays, tunable …
VK Varadan, KJ Vinoy, KA Jose - 2003 - books.google.com
Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro-circuit control. The …
RJ Richards, HJ De Los Santos - Microwave Journal, 2001 - nanomems-research.com
Microelectromechanical systems (MEMS) technology is on the verge of revolutionizing RF and microwave applications. 1 The requirements of present day and future RF/microwave …
Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing …
HJ De Los Santos, RJ Richards - Microwave Journal, 2001 - nanomems-research.com
Microelectromechanical systems (MEMS) technology is on the verge of revolutionizing RF and microwave applications. 1 The requirements of present day and future RF and …