Modeling rf mems devices

K Van Caekenberghe - IEEE Microwave Magazine, 2012 - ieeexplore.ieee.org
The term radio frequency (RF) microelectromechanical systems (MEMS) refers to electronic
devices with a moving submillimeter-sized part (beam, comb, disc, or ring), which provide …

Novel RF MEMS switch and packaging concepts

J Oberhammer - 2004 - diva-portal.org
Radio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized
devices intended to switch, modulate, filter or tune electrical signals from DC to microwave …

Silicon on nothing MEMS electromechanical resonator

C Durand, F Casset, P Ancey, F Judong, A Talbot… - Microsystem …, 2008 - Springer
The very significant growth of the wireless communication industry has spawned
tremendous interest in the development of high performance radio frequencies (RF) …

[图书][B] RF MEMS: theory, design, and technology

GM Rebeiz - 2004 - books.google.com
Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs),
such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or …

Overview of RF MEMS technology and applications

T Purtova, H Schumacher - Handbook of mems for wireless and mobile …, 2013 - Elsevier
This chapter presents an introduction to radio frequency microelectromechanical systems
(RF MEMS) technologies for wireless applications. It starts with reviewing the operation …

RF MEMS from a device perspective

JJ Yao - Journal of micromechanics and microengineering, 2000 - iopscience.iop.org
This paper reviews the recent progress in MEMS for radio frequency (RF) applications from
a device perspective. RF MEMS devices reviewed include switches and relays, tunable …

[图书][B] RF MEMS and their applications

VK Varadan, KJ Vinoy, KA Jose - 2003 - books.google.com
Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and
actuators, which can react to environmental change under micro-circuit control. The …

[PDF][PDF] MEMS for RF/microwave wireless applications: the next wave

RJ Richards, HJ De Los Santos - Microwave Journal, 2001 - nanomems-research.com
Microelectromechanical systems (MEMS) technology is on the verge of revolutionizing RF
and microwave applications. 1 The requirements of present day and future RF/microwave …

Microelectromechanical resonators for radio frequency communication applications

J Basu, TK Bhattacharyya - Microsystem technologies, 2011 - Springer
Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …

[PDF][PDF] MEMS for RF/Microwave wireless applications: The next Wave-Part II

HJ De Los Santos, RJ Richards - Microwave Journal, 2001 - nanomems-research.com
Microelectromechanical systems (MEMS) technology is on the verge of revolutionizing RF
and microwave applications. 1 The requirements of present day and future RF and …