Machining small holes with high efficiency and high surface quality remains a challenging
issue. Laser and shaped tube electrochemical machining (LSTEM) has been proposed to …

Dry etching is a prevalent technique for pattern transfer and material removal in
microelectronics, optics and photonics due to its high precision material removal with low …

Microgrooving on crystalline germanium (Ge)< 100> surface using 1064 nm wavelength
ultrafast laser pulses under ambient condition is investigated. The interaction of laser and …

Molecular dynamics simulations on partially overlapped nano-cutting of monocrystalline
germanium with different feeds are carried out to investigate the surface topography, cutting …

The effect of pulse-on and pulse-off times on the efficiency of micro/nano ECM with ultra-
short voltage pulses is theoretically analyzed. A new approximate analytical equation for the …

This paper investigates the slicing of germanium wafers from single crystal, gallium-doped
ingots using wire electrical discharge machining. Wafers with a thickness of 350μm and a …

Hybrid laser-electrochemical micromachining is a fast and force-free processing technique
to machine difficult-to-cut multi-materials with conductivity variations and has the advantage …

This chapter introduces basics of electrochemical micromachining (ECMM). In this process,
no mechanical contact between tool and workpiece occurs, and machinability is not …

Laser machining and electrochemical machining (LM-ECM) of metal micro-hole is presented
in this study. Millisecond pulsed laser etches metallic materials by thermal effect, and …

This paper proposes a novel tool-based hybrid laser-ECM process which exploits synergy of
laser and electrochemical process energies along the same machining axis, thereby …