[HTML][HTML] Shallow V-shape nanostructured pit arrays in germanium using aqua regia electroless chemical etching

I Chaabane, D Banerjee, O Touayar, SG Cloutier - Materials, 2017 - mdpi.com
Due to its high refractive index, reflectance is often a problem when using Germanium for
optoelectronic devices integration. In this work, we propose an effective and low-cost nano …

Mechanism of material removal in abrasive electrochemical multi-wire sawing of multi-crystalline silicon ingots into wafers

G Bao, W Wang, L Zhang - The International Journal of Advanced …, 2017 - Springer
Abrasive electrochemical multi-wire sawing is a comprehensive process that consists mainly
of mechanical grinding complemented by anodic oxidation (erosion). The mechanism of …

Micro-structuring of glass with features less than 100 μm by electrochemical discharge machining

XD Cao, BH Kim, CN Chu - Precision Engineering, 2009 - Elsevier
Micro-electrochemical discharge machining (ECDM) was studied in order to improve the
machining of 3D micro-structures of glass. To minimize structures and obtain good surface …

Effect of electrochemical dissolving in laser drilling assisted with jet electrochemical machining

H Zhang, P Gao, J Xu, L Yuan - International Journal of Electrochemical …, 2021 - Elsevier
Laser Drilling assisted with jet electrochemical machining (LD-JECM) has been proved be a
useful way for machining high quality holes without recast layer and spatter. In this paper …

Simulation of nano-second pulsed phenomena in electrochemical micromachining processes–Effects of the signal and double layer properties

EL Hotoiu, S Van Damme, C Albu, D Deconinck… - Electrochimica …, 2013 - Elsevier
Pulsed electrochemical micromachining is a metal dissolution process where the capacitive
behaviour of the double layer enhances the confinement of the machining profile, when very …

Effect of temperature on the ductile-to-brittle transition in laser-assisted mechanical ruling of silicon

D Yao, G Shi, S Meng - Materials Science in Semiconductor Processing, 2024 - Elsevier
This paper introduces an innovative hybrid processing method that combines in-situ laser
assisted with mechanical ruling. The innovative diamond ruling tool can facilitate laser …

Study of gas film quality in electrochemical discharge machining

CP Cheng, KL Wu, CC Mai, CK Yang, YS Hsu… - International Journal of …, 2010 - Elsevier
Electrochemical Discharge Machining (ECDM) has been demonstrated to be an alternative
spark-based micromachining method for fabricating microholes and microchannels in non …

[HTML][HTML] Numerical and experimental research on the laser-water jet scribing of silicon

Y Li, Y Ding, B Cheng, J Cao, L Yang - Applied Sciences, 2022 - mdpi.com
Monocrystalline silicon has shown great potential in constructing advanced devices in
semiconductor, photoelectric, and photochemistry fields. The fabrication of micro-grooves …

Numerical simulation of laser drilling and electrochemical machining of metal micro-hole

A Sun, Y Chang, H Liu - Optik, 2019 - Elsevier
Laser drilling and electrochemical machining (LD-ECM) of metal micro-hole is proposed in
this study. First of all, millisecond pulsed laser is directly focalized on the surface of metal in …

Electrochemical mechanical polishing of internal holes created by selective laser melting

C Zhao, N Qu, X Tang - Journal of Manufacturing Processes, 2021 - Elsevier
Selective laser melting (SLM) is a rapidly developing technique in additive manufacturing
(AM) that has attracted considerable interests in industry owing to its tremendous …