In light of recent efforts to implement micromechanical resonators with high-Q and high
frequency, an analytical model for support loss in micromechanical disk resonators has …

This paper presents a comprehensive analysis of support loss, the dominant loss
mechanism, in center-supported micromechanical disk resonators operating in their radial …

A new fabrication methodology that allows self-alignment of a micromechanical structure to
its anchor (s) has been utilized to achieve vibrating radial-contour mode micromechanical …

Surface-micromachined resonators and filters are attractive for many RF applications. While
existing simulation tools allow designers to compute resonant frequencies, few tools provide …

A micromechanical, laterally vibrating disk resonator, fabricated via a technology combining
polysilicon surface-micromachining and metal electroplating to attain submicron lateral …

A vibrating polysilicon micromechanical" hollow-disk" ring resonator obtained by removing
quadrants of material from a solid disk resonator, but purposely leaving intact beams of …

In some Radio Frequency (RF) systems, including transmitters and receivers, resonators
play a key role in system performance. In RF resonator design, it's important to achieve …

A new fabrication methodology that allows self-alignment of a micromechanical structure to
its anchor (s) has been used to achieve vibrating radial-contour mode polysilicon …

The use of hollow support stems to reduce energy loss to the substrate while supporting all-
polysilicon UHF micromechanical disk resonators has enabled quality factors as high as …

Microelectromechanical systems (MEMS) resonators serve as frequency-selective
components in applications ranging from biology to communications. In this paper, the …