Micro-electromechanical beam resonators and arrays are fabricated using a custom low-
temperature (< 300degC) CMOS-compatible silicon carbide micro-fabrication process. A …

Microelectromechanical beam resonators and arrays are fabricated using a custom low-
temperature complementary-metal-oxide-semiconductor-compatible silicon carbide …

A low temperature (< 300ºC), low-stress micro-electromechanical systems (MEMS)
fabrication process based on a mechanically superior silicon carbide structural layer is …

A method for coarse and fine mechanical frequency tuning of MEMS resonators is presented
in this paper. Controlled material deposition onto microresonator top surfaces enables …

ABSTRACT A low temperature, Bi-CMOS compatible process for the fabrication of MEMS
resonators and filters has been developed. These devices hold the promise of reducing cost …

A post-fabrication process was developed to tune the frequency of a set of comb-drive
resonators by selectively adding polysilicon to their rotors. Selective deposition was …

This paper presents the fabrication and characterization of silicon carbide (SiC) flexural-
mode structures able to operate as electrothermomechanical tunable resonators. Single-and …

We developed a clamped-clamped beam micromechanical resonator for actual use in VHF
applications. This three-port resonator showed good frequency spectra with a large peak …

In this letter, we present the design, fabrication, and electrical testing of a silicon carbide
microelectromechanical (MEMS) resonant device with electrothermal actuation and …

Silicon carbide (SiC) is an excellent candidate for use in next generation RF MEMS devices
such as microfabricated switches, micromechanical resonators, and filters. SiC is …