Magnetic tunnel junction structure

X Li - US Patent 9,029,170, 2015 - Google Patents
A magnetic tunnel junction (MTJ) device is formed by a process that includes forming a
trench in a substrate and depositing an MTJ structure within the trench. The MTJ structure …

Magnetic tunnel junction and method for fabricating a magnetic tunnel junction

X Li, K Lee, WC Chen, Y Lu, C Park… - US Patent App. 14 …, 2015 - Google Patents
An improved magnetic tunnel junction device and methods for fabricating the improved
magnetic tunnel junction device are provided. The provided two-etch process reduces …

Post treatment to reduce shunting devices for physical etching process

YJ Wang, D Shen, V Sundar, S Patel - US Patent 10,297,746, 2019 - Google Patents
A method for etching a magnetic tunneling junction (MTJ) structure is described. A stack of
MTJ layers is provided on a bottom electrode. A top electrode is provided on the MTJ stack …

Post treatment to reduce shunting devices for physical etching process

YJ Wang, D Shen, V Sundar, S Patel - US Patent 10,700,269, 2020 - Google Patents
A method for etching a magnetic tunneling junction (MTJ) structure is described. A stack of
MTJ layers is provided on a bottom electrode. A top electrode is provided on the MTJ stack …

Method of forming a magnetic tunnel junction structure

X Li - US Patent 7,579,197, 2009 - Google Patents
In a particular illustrative embodiment, a method of forming a magnetic tunnel junction (MTJ)
device is disclosed that includes forming a trench in a substrate. The method further includes …

Method for fabricating a magnetic tunnel junction device

WH Huang, CY Hsu, SC Liu, CS Tsai - US Patent 9,142,761, 2015 - Google Patents
US9142761B2 - Method for fabricating a magnetic tunnel junction device - Google Patents
US9142761B2 - Method for fabricating a magnetic tunnel junction device - Google Patents …

Magnetic tunnel junction device and fabrication

X Li, SH Kang, X Zhu - US Patent 8,912,012, 2014 - Google Patents
(57) ABSTRACT A magnetic tunnel junction (MTJ) device and fabrication method is
disclosed. In a particular embodiment, a method is disclosed that includes forming a …

Reverse partial etching scheme for magnetic device applications

W Yu-Jen, C Yuan-Tung - US Patent 8,748,197, 2014 - Google Patents
A magnetic tunnel junction (MTJ) structure is provided over a device wherein the MTJ
comprises a tunnel barrier layer between a free layer and a pinned layer; and a top and …

Magnetic tunnel junction and method of fabrication

X Li, SH Kang, X Zhu, K Lee, M Nowak - US Patent 7,829,923, 2010 - Google Patents
In a particular embodiment, a method of fabricating a mag netic tunnel junction (MTJ) device
is disclosed. The method includes applying a metal layer to a Surface, applying a dielectric …

Magnetic tunnel junction device

WH Huang, CY Hsu, SC Liu, CS Tsai - US Patent 9,608,195, 2017 - Google Patents
US9608195B2 - Magnetic tunnel junction device - Google Patents US9608195B2 - Magnetic
tunnel junction device - Google Patents Magnetic tunnel junction device Download PDF Info …