Stable nanodepth and nanogram level material removal in electrochemically induced chemical etching of fused quartz

L Meng, Y Liu, Y Yan, D Guo, P Zhou - Precision Engineering, 2024 - Elsevier
The minimum and stability of material removal are critical determinants of the accuracy
limitations in precision engineering. This study explores electrochemically induced chemical …

Application of electrochemical discharge machining to micro-machining of quartz

KL Wu, HM Lee, KH Chin - Advanced Materials Research, 2014 - Trans Tech Publ
Electrochemical discharge machining (ECDM) is the preferred non-traditional process
technology in recent years, The main processing is applied to machining non-conductive …

Isotropic tuning of electrochemical etching for the nanometric finishing of metals

R Yi, Z Zhan, H Deng - Nanomanufacturing and Metrology, 2022 - Springer
Isotropic etching polishing (IEP) based on the merging of isotropic etch pits has been
proposed as a generic metal finishing approach. In this work, the tuning of the etching …

[HTML][HTML] Etching of quartz crystals in liquid phase environment: A review

Y Dong, Y Zhou, H Huang, B Zhang, X Li… - Nanotechnology and …, 2024 - pubs.aip.org
Quartz crystals are the most widely used material in resonant sensors, owing to their
excellent piezoelectric and mechanical properties. With the development of portable and …

Study of hole-machining on Pyrex wafer by electrochemical discharge machining (ECDM)

YS Liao, WY Peng - Materials science forum, 2006 - Trans Tech Publ
The gap control problem in hole-machining of Pyrex® wafer by electrochemical discharge
machining (ECDM) to obtain a smooth quality and acceptable material removal rate is …

Oscillatory behaviour in the electrochemical jet processing of titanium

A Speidel, J Mitchell-Smith, I Bisterov… - Journal of Materials …, 2019 - Elsevier
When appraising the performance of titanium alloys for corrosion resistance in halide
environments researchers have well understood pitting and growth mechanisms through …

Toward a better understanding of glass gravity-feed micro-hole drilling with electrochemical discharges

M Jalali, P Maillard, R Wüthrich - Journal of Micromechanics and …, 2009 - iopscience.iop.org
Spark-assisted chemical engraving (SACE) is a flexible, simple and inexpensive method for
machining electrically non-conductive materials. SACE is particularly interesting because of …

Electrochemical etching technique for tungsten electrodes with controllable profiles for micro-electrical discharge machining

TH Duong, HC Kim - International Journal of Precision Engineering and …, 2015 - Springer
Lately, the development of micro/nano-scale devices in optics, displays, communications,
electronics, and fuel-cell industries has given rise to the advent of various micro-machining …

[HTML][HTML] Ultrasonic vibration-assisted electrochemical discharge machining of quartz wafer micro-hole arrays

CH Yang, TC Wang, JC Hung, HP Tsui - Processes, 2023 - mdpi.com
The micro-hole machining of quartz wafers depends on photolithography techniques akin to
those used in semiconductor fabrication. These methods present challenges due to high …

Electro-chemical micro drilling using ultra short pulses

SH Ahn, SH Ryu, DK Choi, CN Chu - Precision Engineering, 2004 - Elsevier
Electro-chemical machining (ECM) has been rarely applied in micro machining because the
electric field is not localized. In this work, ultra short pulses with tens of nanosecond duration …