In this era, advanced non-conducting materials are gaining importance due to their superior
properties. However, it is difficult to micro-machine these materials inefficiency and also …

Micro fabrication is generally confined to silicon-based processes for microelectronic
applications. The advent of micro electromechanical systems (MEMS) using silicon and …

This work presents a revised EDM process by quantitatively and qualitatively measuring the
process using different dielectric fluids. The revised EDM process is developed by modifying …

Application fields of electrical discharge machining (EDM) are limited due to given process
conditions. Manufacturing of parts with high aspect ratios and the application of multi-axis …

Electrochemical discharge machining (ECDM) is a micro-machining hybrid technique that
utilizes electrical discharge and electrochemical machining principles. However, the issue of …

Electrical discharge machining (EDM) is widely used to machine hard materials, such as
tungsten carbide; however, the machining rate and surface quality are low. In this research …

This paper reports a parametric study of batch mode micro-electro-discharge machining
(µEDM) of high density features in stainless steel. Lithographically fabricated copper tools …

Electrochemical micromachining has good application potential for processing of materials.
The size of microtool poles is the key in electrochemical micromachining, which directly …

High speed directional etching of non conventional materials is still insufficiently developed
for producing high aspect ratio microstructures. Compared to deep silicon etching, the …

Glass and ceramics have broad applications in modern industries; however, unique
properties such as brittleness, and low machinability limit their fabrication processes. This …