Realization of a capacitive shunt RF-MEMS switch using straight flexure based non-uniform bridge structure-fabrication and characterization

M Angira, D Bansal - Microsystem Technologies, 2021 - Springer
This work presents the fabrication and characterization of a capacitive switch. The switch is
implemented through a non-uniform shape based bridge structure. The design uses four …

Capacitive RF switches manufactured by the CMOS–MEMS technique

MZ Yang, CL Dai, PJ Shih, ZY Tsai - Microelectronic engineering, 2011 - Elsevier
This work investigates the fabrication and characterization of a capacitive radio frequency
(RF) switch using the complementary metal oxide semiconductor (CMOS) …

Low actuation voltage capacitive shunt RF-MEMS switch having a corrugated bridge

YT Song, HY Lee, M Esashi - IEICE transactions on electronics, 2006 - search.ieice.org
This paper presents the design, fabrication and characterization of a low actuation voltage
capacitive shunt RF-MEMS switch for microwave and millimeter-wave applications based on …

Design, optimization and simulation of a low-voltage shunt capacitive RF-MEMS switch

LY Ma, AN Nordin, N Soin - Microsystem technologies, 2016 - Springer
This paper presents the design, optimization and simulation of a radio frequency (RF) micro-
electromechanical system (MEMS) switch. The capacitive RF-MEMS switch is …

A novel design of a low-voltage low-loss T-match RF-MEMS capacitive switch

LY Ma, AN Nordin, N Soin - Microsystem Technologies, 2018 - Springer
This paper presents a novel design, optimization and analysis of capacitive radio frequency
(RF) micro-electromechanical system (MEMS) switch. The design incorporates a novel …

Design and simulation of a novel RF MEMS shunt capacitive switch with a unique spring for Ka-band application

HR Ansari, S Khosroabadi - Microsystem technologies, 2019 - Springer
RF-MEMS switches may be divided into capacitive and metal-to-metal types in terms of type
of connection. In capacitive switches in the OFF-state the beam does not attach to the …

A low insertion loss, multi-band, fixed central capacitor based RF-MEMS switch

M Angira, K Rangra - Microsystem Technologies, 2015 - Springer
This paper presents a new type of capacitive shunt RF-MEMS switch. In the proposed
design, switch consists of a beam in the form of two symmetric cantilevers anchored at the …

Performance improvement of RF-MEMS capacitive switch via asymmetric structure design

M Angira, K Rangra - Microsystem Technologies, 2015 - Springer
This paper presents a new type of capacitive shunt RF-MEMS switch. In the proposed
design, float metal concept has been utilized to make the asymmetric structure on either side …

Design and simulation a low voltage actuated RF MEMS switch with improve RF characteristics

TZ Ershadi, E Salimi, H Zolfkhani - Advanced Materials Research, 2012 - Trans Tech Publ
This paper present, the design and simulation of the Ka to v band RF-MEMS capacitive
switch. The mechanic design and analysis of the RF-MEMS switches are based on both the …

Design and simulation of RF MEMS shunt capacitive switch with non-uniform meanders for C-band applications

KG Sravani, DKN Mallika, G Meghana… - Microsystem …, 2020 - Springer
This paper presents, the design and simulation of RF MEMS shunt capacitive switch. The
electromechanical and electromagnetic analysis of the switch has been done using …