This paper presents two methods for counteracting the unwanted deflection due to warping
or buckling effects, which are serious potential problems in many fabrication processes of …

Radio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized
devices intended to switch, modulate, filter or tune electrical signals from DC to microwave …

This paper presents the design, fabrication and characterization of an RF MEMS switch. Low
actuation voltage and high isolation of the switch were achieved by exploiting buckling and …

MEMS switches provide high isolation when open and low insertion loss when closed. They
also have the advantages of low power consumption. Therefore, RF MEMS switches are an …

This paper reports on the experimental and theoretical characterization of RF
microelectromechanical systems (MEMS) switches for high-power applications. First, we …

This paper reports on design and fabrication aspects of a new microelectromechanical
series switch for switching dc and RF signals. The switch consists of a flexible S-shaped film …

Any film which is deposited during the fabrication undergoes some form of stress. It can be
either a compressive stress or tensile stress. It is important to have right value of either …

RF microelectromechanical (MEMS) switches are usually limited in term of power handling.
Self actuation and electro migration constitute indeed the main failure mechanisms related …

This paper details few mechanical modeling and design issues of RF MEMS switches. We
concentrate on an electrostatically actuated broad side series switch; surface …

We report on small, low-ohmic RF MEMS switches with a circular membrane actuator
design. A low temperature process is used to manufacture both the MEMS switch as well as …