Automated, ultra‐fast laser‐drilling of nanometer scale pores and nanopore arrays in aqueous solutions

T Gilboa, E Zvuloni, A Zrehen… - Advanced Functional …, 2020 - Wiley Online Library
The ability to quickly and reliably fabricate nanoscale pore arrays in ultra‐thin membranes
such as silicon nitride (SixN) is extremely important for the growing field of nanopore …

Fast and deterministic fabrication of sub-5 nanometer solid-state pores by feedback-controlled laser processing

E Zvuloni, A Zrehen, T Gilboa, A Meller - ACS nano, 2021 - ACS Publications
Nanopores are single-molecule sensors capable of detecting and quantifying a broad range
of unlabeled biomolecules including DNA and proteins. Nanopores' generic sensing …

Optically-monitored nanopore fabrication using a focused laser beam

T Gilboa, A Zrehen, A Girsault, A Meller - Scientific reports, 2018 - nature.com
Solid-state nanopores (ssNPs) are extremely versatile single-molecule sensors and their
potential have been established in numerous biomedical applications. However, the …

Photothermally assisted thinning of silicon nitride membranes for ultrathin asymmetric nanopores

H Yamazaki, R Hu, Q Zhao, M Wanunu - ACS nano, 2018 - ACS Publications
Sculpting solid-state materials at the nanoscale is an important step in the manufacturing of
numerous types of sensor devices, in particular solid-state nanopore sensors. Here we …

Formation of single nanopores with diameters of 20–50 nm in silicon nitride membranes using laser-assisted controlled breakdown

C Ying, J Houghtaling, OM Eggenberger, A Guha… - ACS …, 2018 - ACS Publications
Nanopores with diameters from 20 to 50 nm in silicon nitride (SiN x) windows are useful for
single-molecule studies of globular macromolecules. While controlled breakdown (CBD) is …

Lithography-free formation of nanopores in plastic membranes using laser heating

S Wu, SR Park, XS Ling - Nano letters, 2006 - ACS Publications
Synthetic nanopores are a new class of single-molecule sensors capable of electronically
detecting, counting, and characterizing biomolecules. There have been studies of nanopore …

Nanopore arrays in a silicon membrane for parallel single-molecule detection: fabrication

T Schmidt, M Zhang, I Sychugov, N Roxhed… - …, 2015 - iopscience.iop.org
Solid state nanopores enable translocation and detection of single bio-molecules such as
DNA in buffer solutions. Here, sub-10 nm nanopore arrays in silicon membranes were …

Fabrication of solid-state nanopores with single-nanometre precision

AJ Storm, JH Chen, XS Ling, HW Zandbergen… - Nature materials, 2003 - nature.com
Single nanometre-sized pores (nanopores) embedded in an insulating membrane are an
exciting new class of nanosensors for rapid electrical detection and characterization of …

Ultrathin, High-Lifetime Silicon Nitride Membranes for Nanopore Sensing

S Dutt, BI Karawdeniya, YMNDY Bandara… - Analytical …, 2023 - ACS Publications
Thin membranes are highly sought-after for nanopore-based single-molecule sensing, and
fabrication of such membranes becomes challenging in the≲ 10 nm thickness regime where …

Rapid manufacturing of low-noise membranes for nanopore sensors by trans-chip illumination lithography

XJA Janssen, MP Jonsson, C Plesa, GV Soni… - …, 2012 - iopscience.iop.org
In recent years, the concept of nanopore sensing has matured from a proof-of-principle
method to a widespread, versatile technique for the study of biomolecular properties and …