Sub-50 mV operation of nano-electro-mechanical relays is demonstrated for the first time,
enabled by an anti-stiction molecular coating. Specifically, a self-assembled monolayer of …

To enable energy-efficient electronic devices for the future, nano-electro-mechanical (NEM)
relays are promising due to their high ON/OFF current ratio and potential for low operating …

This paper reports the design, fabrication, characterization, and scaling analysis of novel
buckling-based nanoelectromechanical relays that use, for the first time, piezoelectric …

50-mV operation of digital integrated circuits at room temperature is demonstrated for the
first time using body-biased microelectromechanical relays. An improved relay design and …

Electrostatically actuated nanoelectromechanical (NEM) relays are integrated with silicon
nMOS devices. An nMOSFET successfully drives a NEM relay with the MOSFET serving as a …

The design, fabrication, and characterization of the first piezoelectric nanoelectromechanical
relays with sub-1-volt actuation (520 mV) are presented. The low actuation voltage is …

Electromechanical relays exhibit inherently zero leakage and sharp hysteresis, which are
compelling for logic and memory applications. We present an overview of the nano-scale …

Integrated nanoelectromechanical (NEM) relays can be used instead of transistors to
implement ultra-low power logic circuits, due to their abrupt turn off characteristics and zero …

Laterally actuated nanoelectromechanical relays with compliant source-drain contacts are
presented. The relay sidewalls are coated with a 30 nm-thick conductive layer of titanium …

This paper describes the improvement of pull-in stability, contact properties, and reliability of
laterally actuated nanoelectromechanical relays by partitioning the mechanical and …