One-dimensional light modulator

S Sinning, I Wullinger, JU Schmidt… - MOEMS and …, 2012 - spiedigitallibrary.org
Facing the recent developments in the area of (quasi) continuous wave lasers towards
higher power the Fraunhofer IPMS introduces a novel light modulator incorporating an …

The high versatility of silicon based micro-optical modulators

H Schenk - MOEMS and Miniaturized Systems VIII, 2009 - spiedigitallibrary.org
" One product, one process": This MEMS law is true for micro-optical modulators, too and
thus puts a high load on every product and technology development team. On the other …

Micro mirrors for high-speed laser deflection and patterning

H Schenk, J Grahmann, T Sandner, M Wagner… - Physics Procedia, 2014 - Elsevier
This paper focuses on high-speed optical MEMS Scanners and Micro Mirror Arrays. Devices
supporting spot/pixel rateshigher than 10 Mpixel/s are considered and discussed regarding …

Analog spatial light modulators based on micromirror arrays

U Dauderstädt, P Dürr, A Gehner, M Wagner, H Schenk - Micromachines, 2021 - mdpi.com
The Fraunhofer Institute for Photonic Microsystems (IPMS) has been developing and
manufacturing micromirror arrays for more than 20 years. While originally focusing on …

High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

JU Schmidt, UA Dauderstaedt, P Duerr… - MOEMS and …, 2014 - spiedigitallibrary.org
Fraunhofer IPMS has developed a one-dimensional high-speed spatial light modulator in
cooperation with Micronic Mydata AB. This SLM is the core element of the Swedish …

Fabrication of a highly variable curvature mirror: testing and results

M Ferrari, SP Mazzanti… - … Conference on Optical …, 1995 - spiedigitallibrary.org
A variable curvature mirror is a powerful device that can increase the field of view of optical
interferometers. Such a mirror is being developed for the coherent combined focus of the …

Design and fabrication of a MEMS mirror for miniature laser projection

R Sanders, D van Lierop, B de Jong… - MOEMS and …, 2009 - spiedigitallibrary.org
For miniature laser projection displays the laser beam is swept very fast back and forth with
a MEMS mirror. This paper presents an innovative design for such a MEMS mirror. Both the …

Recent advances in thin-film microoptics

R Grunwald, U Neumann, U Griebner… - Opto-Ireland 2005 …, 2005 - spiedigitallibrary.org
Novel types of thin-film microoptical components have been found very advantageous for
beam shaping of high-power and ultrashort-pulse lasers. Measuring techniques, nonlinear …

Photonic microsystems: an enabling technology for light deflection and modulation

H Schenk, A Wolter, UA Dauderstadt… - … Imaging Systems II, 2004 - spiedigitallibrary.org
Light and electricity are said to be the all purpose tools for the next decades. Photonic
Microsystems combine this tools in an ideal manner: They are electronically addressable …

Ultra compact laser projection systems based on two-dimensional resonant micro scanning mirrors

M Scholles, A Bräuer, K Frommhagen… - MOEMS and …, 2007 - spiedigitallibrary.org
Recently, there has been substantial progress in the development of ultra-compact image
projection systems with dimensions clearly below the size of products based on DMD TM …