Any film which is deposited during the fabrication undergoes some form of stress. It can be
either a compressive stress or tensile stress. It is important to have right value of either …

This paper presents two methods for counteracting the unwanted deflection due to warping
or buckling effects, which are serious potential problems in many fabrication processes of …

One main obstacle that reduces the yield in RF MEMS technology is the variation of the
residual stress resulting from fabrication. Residual stress can occur across the wafer, from …

This paper addresses mathematical analysis of the mechanics involved in RF MEMS Switch.
The fixed-fixed beam undergoes deflection in y direction when a force is applied onto the …

Electrostatically actuated microelectromechanical system (MEMS) switches with fixed-fixed
beams were fabricated. FEM modeling was used to calculate the contributions of stress in …

Due to the development of micro-mechanical systems (MEMS), RF MEMS switches are
being widely investigated. Although RF MEMS switches have been intensively studied …

In this paper we present an intrinsic mechanical characteristic of MEMS switches, the
hysteresis in ON-OFF cycle of operation. The hysteresis in voltage arises from the transition …

Abstract Two-dimensional (2-D) coupled electrostatic-mechanical model of RF MEMS
switches has been developed, in which the effect of residual stress due to the fabrication …

This paper presents analysis on parameters required for the fabrication process of RF
MEMS switches. Stress analysis on gold thin film and variation of stress with different …

In this paper an analysis of the von Mises stress in the RF MEMS switch structures is
presented. This study was performed to analyze and optimize the stress in the anchors area …