Having recently been demonstrated at frequencies up to 1.9 GHz with Q's> 10,000 and
record frequency-Q product of 2.75 times10 13 exceeding those of quartz crystals, vibrating …

Micromechanical RF filters and reference oscillators based on recently demonstrated
vibrating on-chip micromechanical resonators with Qs> 10,000 at 1.5 GHz, are described as …

Micromechanical RF filters and reference oscillators based on recently demonstrated
vibrating on-chip micromechani-cal resonators with Q's> 10,000 at 1.5 GHz, are described …

Micromechanical (or “μmechanical”) components for communication applications fabricated
via IC-compatible MEMS technologies and capable of low-loss filtering, mixing, switching …

Having produced devices with sufficient Q, thermal stability, and manufacturability, for
component-level use in present-day wireless handsets, vibrating RF MEMS technology is …

Having now produced devices with sufficient Q, thermal stability, aging stability, and
manufacturability, vibrating RF MEMS technology is already finding its way into next …

An overview on the vise of microelectromechanical systems (MEMS) technologies for timing
and frequency control is presented. In particular, micromechanical RF filters and reference …

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …

With Q's in the tens to hundreds of thousands, micromachined vibrating resonators are
proposed as integrated circuit-compatible tanks for use in the low phase-noise oscillators …

Series-resonant vibrating micromechanical resonator oscillators, using a custom-designed,
single-stage, zero-phase-shift sustaining amplifier together with surface-micromachined …