Fabrication of solid-state nanopores with single-nanometre precision

AJ Storm, JH Chen, XS Ling, HW Zandbergen… - Nature materials, 2003 - nature.com
Single nanometre-sized pores (nanopores) embedded in an insulating membrane are an
exciting new class of nanosensors for rapid electrical detection and characterization of …

Fabrication and functionalization of nanochannels by electron-beam-induced silicon oxide deposition

C Danelon, C Santschi, J Brugger, H Vogel - Langmuir, 2006 - ACS Publications
We report on the fabrication and electrical characterization of functionalized solid-state
nanopores in low stress silicon nitride membranes. First, a pore of∼ 50 nm diameter was …

Versatile ultrathin nanoporous silicon nitride membranes

I Vlassiouk, PY Apel, SN Dmitriev… - Proceedings of the …, 2009 - National Acad Sciences
Single-and multiple-nanopore membranes are both highly interesting for biosensing and
separation processes, as well as their ability to mimic biological membranes. The density of …

Nanopores in solid-state membranes engineered for single molecule detection

V Dimitrov, U Mirsaidov, D Wang, T Sorsch… - …, 2010 - iopscience.iop.org
A nanopore is an analytical tool with single molecule sensitivity. For detection, a nanopore
relies on the electrical signal that develops when a molecule translocates through it …

Fabrication of symmetric sub-5 nm nanopores using focused ion and electron beams

CJ Lo, T Aref, A Bezryadin - Nanotechnology, 2006 - iopscience.iop.org
Nanopores fabricated in solid-state membranes have previously been used for the rapid
electrical detection and characterization of single biopolymer molecules. Various methods …

Chemically modified solid-state nanopores

M Wanunu, A Meller - Nano letters, 2007 - ACS Publications
Nanopores are extremely sensitive single-molecule sensors. Recently, electron beams have
been used to fabricate synthetic nanopores in thin solid-state membranes with …

Optically-monitored nanopore fabrication using a focused laser beam

T Gilboa, A Zrehen, A Girsault, A Meller - Scientific reports, 2018 - nature.com
Solid-state nanopores (ssNPs) are extremely versatile single-molecule sensors and their
potential have been established in numerous biomedical applications. However, the …

Localized functionalization of single nanopores

J Nilsson, JRI Lee, TV Ratto, SE Létant - Advanced materials, 2006 - Wiley Online Library
The Coulter-counter principle used for cell enumeration in hematology laboratories is based
on the fact that the ionic current through a single aperture drops each time a cell obstructs …

Formation of nanopores in a SiN∕ SiO2 membrane with an electron beam

MY Wu, D Krapf, M Zandbergen, H Zandbergen… - Applied Physics …, 2005 - pubs.aip.org
An electron beam can drill nanopores in Si O 2 or silicon nitride membranes and shrink a
pore to a smaller diameter. Such nanopores are promising for single molecule detection …

Control of shape and material composition of solid-state nanopores

MY Wu, RMM Smeets, M Zandbergen, U Ziese… - Nano …, 2009 - ACS Publications
Solid-state nanopores fabricated by a high-intensity electron beam in ceramic membranes
can be fine-tuned on three-dimensional geometry and composition by choice of materials …