This paper presents the design, fabrication and characterization of a piezoelectrically
actuated high-fill-factor tip-tilt-piston (TTP) micromirror with small tilt and lateral shift during …

This paper presents the design, fabrication and characterization of a tip–tilt–piston (TTP)
piezoelectric micromirror. A unique double S-shaped unimorph piezoelectric (dSUP) …

In this paper, we present the design, fabrication, and characterization of a high-fill-factor tip-
tilt-piston micromirror actuated by four symmetrical lateral-shift-free (LSF) piezoelectric …

A novel piston-type micromirror with a stroke of up to 20 µm at 20 V formed out of a silicon-
on-insulator wafer with integrated piezoelectric actuators was designed, fabricated and …

A novel dynamic excitation of an S-shaped PZT piezoelectric actuator, which is
conceptualized by having two superimposed AC voltages, is characterized in this paper …

This paper describes a proof-of-concept deformable mirror (DM) technology, with a
continuous single-crystal silicon membrane reflecting surface, based on …

A silicon micromirror driven by piezoelectric Pb (Zr, Ti) O3 cantilever actuator has been
demonstrated for 2-D scanning applications. Two different PZT actuator designs have been …

This paper presents the design, optimization, fabrication, and test results of an
electrothermally actuated tip-tilt-piston micromirror with a large optical aperture of 1 mm. The …

A silicon micromirror driven by piezoelectric Pb (Zr, Ti) O3 beam actuators has been
demonstrated for two-dimensional (2D) scanning mirror applications. Two devices of similar …

In this paper, we propose a new mechanical design of piezoelectric unimorph actuator that
generate large static deflection angle by accumulating angular displacement in a cascaded …