Direct growth of graphene film on germanium substrate

G Wang, M Zhang, Y Zhu, G Ding, D Jiang, Q Guo… - Scientific reports, 2013 - nature.com
Graphene has been predicted to play a role in post-silicon electronics due to the
extraordinary carrier mobility. Chemical vapor deposition of graphene on transition metals …

Metal-free CVD graphene synthesis on 200 mm Ge/Si (001) substrates

M Lukosius, J Dabrowski, J Kitzmann… - … applied materials & …, 2016 - ACS Publications
Good quality, complementary-metal-oxide-semiconductor (CMOS) technology compatible,
200 mm graphene was obtained on Ge (001)/Si (001) wafers in this work. Chemical vapor …

Graphene grown on Ge (0 0 1) from atomic source

G Lippert, J Dąbrowski, T Schroeder, MA Schubert… - Carbon, 2014 - Elsevier
Among the many anticipated applications of graphene, some–such as transistors for Si
microelectronics–would greatly benefit from the possibility to deposit graphene directly on a …

Direct growth of graphene on silicon by metal-free chemical vapor deposition

L Tai, D Zhu, X Liu, T Yang, L Wang, R Wang, S Jiang… - Nano-Micro Letters, 2018 - Springer
The metal-free synthesis of graphene on single-crystal silicon substrates, the most common
commercial semiconductor, is of paramount significance for many technological …

Epitaxial graphene on silicon substrates

M Suemitsu, H Fukidome - Journal of Physics D: Applied Physics, 2010 - iopscience.iop.org
By forming an ultrathin (∼ 100 nm) SiC film on Si substrates and by annealing it at∼ 1500 K
in vacuo, few-layer graphene is formed on Si substrates. Graphene grows on three major …

Near room temperature chemical vapor deposition of graphene with diluted methane and molten gallium catalyst

J Fujita, T Hiyama, A Hirukawa, T Kondo, J Nakamura… - Scientific reports, 2017 - nature.com
Direct growth of graphene integrated into electronic devices is highly desirable but difficult
due to the nominal~ 1000° C chemical vapor deposition (CVD) temperature, which can …

Investigating the CVD synthesis of graphene on Ge (100): toward layer-by-layer growth

AM Scaparro, V Miseikis, C Coletti… - … applied materials & …, 2016 - ACS Publications
Germanium is emerging as the substrate of choice for the growth of graphene in CMOS-
compatible processes. For future application in next generation devices the accurate control …

Graphene growth on Ge (100)/Si (100) substrates by CVD method

I Pasternak, M Wesolowski, I Jozwik, M Lukosius… - Scientific reports, 2016 - nature.com
The successful integration of graphene into microelectronic devices is strongly dependent
on the availability of direct deposition processes, which can provide uniform, large area and …

Graphene growth and device integration

L Colombo, RM Wallace, RS Ruoff - Proceedings of the IEEE, 2013 - ieeexplore.ieee.org
Graphene has been introduced to the electronics community as a potentially useful material
for scaling electronic devices to meet low-power and high-performance targets set by the …

Direct formation of wafer scale graphene thin layers on insulating substrates by chemical vapor deposition

CY Su, AY Lu, CY Wu, YT Li, KK Liu, W Zhang… - Nano …, 2011 - ACS Publications
Direct formation of high-quality and wafer scale graphene thin layers on insulating gate
dielectrics such as SiO2 is emergent for graphene electronics using Si-wafer compatible …