[PDF][PDF] A mechanical approach to overcome RF MEMS switch stiction problem

L Mercado, SM Kuo, TYT Lee, L Liu - Electronic components and …, 2003 - Citeseer
MEMS switches provide high isolation when open and low insertion loss when closed. They
also have the advantages of low power consumption. Therefore, RF MEMS switches are an …

Mechanics-based solutions to RF MEMS switch stiction problem

LL Mercado, SM Kuo, TYT Lee… - IEEE Transactions on …, 2004 - ieeexplore.ieee.org
RF micro-electro-mechanical systems (MEMS) switches are an attractive solution to switch
antenna bands and transmit/receive switching for future multiband, high bandwidth cell …

Stiction-protected MEMS switch with low actuation voltage

IV Uvarov, AN Kupriyanov - Microsystem Technologies, 2019 - Springer
Commercial success of microelectromechanical systems (MEMS) switches is limited by
several issues. A high actuation voltage requires special circuitry solutions that increase size …

A novel technique to alleviate the stiction phenomenon in radio frequency microelectromechanical switches

M Barbato, G Meneghesso - IEEE electron device letters, 2014 - ieeexplore.ieee.org
Radio frequency (RF) microelectromechanical system (MEMS) switches subject to long term
actuation suffer from narrowing of the actuation and release voltages. This can lead to the …

A novel RF MEMS switch with novel mechanical structure modeling

KY Chan, R Ramer - Journal of Micromechanics and …, 2009 - iopscience.iop.org
Abstract A novel RF MEMS contact-type switch for RF and microwave applications is
presented. The switch is designed with special mechanical structures for stiffness …

Comparative study of perforated RF MEMS switch

A Saxena, VK Agrawal - Procedia Computer Science, 2015 - Elsevier
MEMS are the Micro Electronic mechanical system or in general terms it is also known as
Micro electronic mechanical switch. MEMS have classified in two types of switch that is …

Design and experimental validation of a restoring force enhanced RF MEMS capacitive switch with stiction-recovery electrodes

M Li, J Zhao, Z You, G Zhao - Microsystem Technologies, 2017 - Springer
This paper presents an approach for restoring force enhancement to radio frequency (RF)
micro-electro-mechanical systems (MEMS) switch with stiction-recovery actuation …

Alleviating the adverse effects of residual stress in RF MEMS switches

D Peroulis, SP Pacheco, K Sarabandi… - 2001 31st European …, 2001 - ieeexplore.ieee.org
This paper presents two methods for counteracting the unwanted deflection due to warping
or buckling effects, which are serious potential problems in many fabrication processes of …

Design and modeling of a novel RF MEMS series switch with low actuation voltage

K Khodadady, BA Ganji - Microsystem Technologies, 2016 - Springer
This paper presents the design, analysis, modeling and simulation of a novel RF MEMS
series switches with low actuation voltage. A mechanical modeling is presented to describe …

Fabrication of high power RF MEMS switches

L Wang, Z Cui, JS Hong, EP McErlean… - Microelectronic …, 2006 - Elsevier
High power RF MEMS switches have been designed and fabricated. The switches are
composed of a matrix of ohmic contact cantilevers and bridges. Optimized fabrication …