Ohmic contacts on n-type and p-type cubic silicon carbide (3C-SiC) grown on silicon

M Spera, G Greco, RL Nigro, C Bongiorno… - Materials Science in …, 2019 - Elsevier
This paper is a report on Ohmic contacts on n-type and p-type type cubic silicon carbide (3C-
SiC) layers grown on silicon substrates. In particular, the morphological, electrical and …

Fabrication and characterization of ohmic contacts to 3C-SiC layers grown on silicon

M Spera, G Greco, R Lo Nigro, S Di Franco… - Materials Science …, 2019 - Trans Tech Publ
This paper reports on the formation and characterization of Ohmic contacts to n-type and p-
type type 3C-SiC layers grown on silicon substrates. In particular, Ohmic contact behavior …

The role of nickel and titanium in the formation of ohmic contacts on p-type 4H–SiC

F Laariedh, M Lazar, P Cremillieu… - Semiconductor …, 2013 - iopscience.iop.org
The formation of low resistivity ohmic contacts to p-type 4H–SiC is achieved. Transfer length
method (TLM)-based structures were fabricated on 0.8 µm thick epitaxial p-type silicon …

Electrical and structural properties of surfaces and interfaces in Ti/Al/Ni Ohmic contacts to p-type implanted 4H-SiC

M Vivona, G Greco, C Bongiorno, RL Nigro… - Applied Surface …, 2017 - Elsevier
In this work, the electrical and structural properties of Ti/Al/Ni Ohmic contacts to p-type
implanted silicon carbide (4H-SiC) were studied employing different techniques. With …

A critical review of ohmic and rectifying contacts for silicon carbide

LM Porter, RF Davis - Materials Science and Engineering: B, 1995 - Elsevier
For more than three decades, SiC has been investigated as a wide band gap
semiconductor. This paper reviews ohmic and rectifying metal contacts on n-and p-type α …

Improvement of high temperature stability of nickel contacts on n-type 6H–SiC

F Roccaforte, F La Via, V Raineri, L Calcagno… - Applied surface …, 2001 - Elsevier
The structural and electrical characterisation of nickel contacts on n-type silicon carbide was
performed to improve the ohmic behaviour at high temperatures. The formation of nickel …

Improved Ni ohmic contact on n-type 4H-SiC

C Hallin, R Yakimova, B Pecz, A Georgieva… - Journal of electronic …, 1997 - Springer
This paper presents the structural, chemical and electronic properties of Al/Ni/Al-layers
evaporated on 4H silicon carbide and then annealed at 1000° C for 5 min. The structure was …

High temperature ohmic contacts to 3C-SiC grown on Si substrates by chemical vapor deposition

G Constantinidis, N Kornilios, K Zekentes… - Materials Science and …, 1997 - Elsevier
The properties of SiC have great potential for high temperature electronic device
applications. For the realization of these devices the formation of stable (at elevated …

TEM characterisation of silicide phase formation in Ni-based ohmic contacts to 4H n-SiC

M Wzorek, A Czerwinski, A Kuchuk, J Ratajczak… - Materials …, 2011 - jstage.jst.go.jp
Silicon carbide, due to its unique properties, is a material with a high application potential for
development of high power, high frequency and high temperature electronic devices …

Comparison of Ni/Ti and Ni ohmic contacts on n-type 6H–SiC

B Barda, P Macháč, M Hubičková, J Náhlík - Journal of Materials Science …, 2008 - Springer
Abstract Ni (50 nm)/Ti (10 nm) and Ni (50 nm) contact structures were deposited by vacuum
evaporation on n-type 6H–SiC with various doping level. Prior to deposition, part of the …