[图书][B] Visually-guided multi-probe microassembly of spatial microelectromechanical systems

JD Wason - 2011 - dl.acm.org
Visually guided multi-probe microassembly is a novel method to assemble microparts to
produce micro-electromechanical system (MEMS) devices consisting of multiple microparts …

[图书][B] Microassembly of 3D Microstructures and Micro-Electromechanical Systems (MEMS)

N Dechev - 2005 - library-archives.canada.ca
This work describes the design and development of a general microassembly system that is
used to construct 3D microstructures or 3D micro-electromechanical systems (MEMS) from a …

[图书][B] An Automated Micromanipulation System for 3D Parallel Microassembly

HKH Chu - 2011 - library-archives.canada.ca
Abstract<? Pub Inc> The introduction of microassembly technologies has opened up new
venues for the fabrication of sophisticated, three-dimensional Microelectromechanical …

Robotic microassembly of 3D MEMS structures

N Dechev - Robotic Microassembly, 2010 - Wiley Online Library
The creation of useful microelectromechanical system (MEMS) device is the end goal of any
microassembly process. However, the use of microassembly generally places limits on the …

Automatic microassembly using visual servo control

L Wang, JK Mills, WL Cleghorn - IEEE Transactions on …, 2008 - ieeexplore.ieee.org
We propose an automatic microassembly method that can be used to construct three-
dimensional microelectromechanical system (MEMS) structures. A six degree-of-freedom …

[PDF][PDF] Robust Vision-Guided Multi-probe Microassembly

J Wason, JT Wen - Control issues in the micro/nano-world - researchgate.net
In this workshop presentation, we will present the control algorithm development and
experimental results for the 3D assembly of sub-millimeter parts using multiple sharp probes …

Challenges and opportunities in MEMS development, assembly and applications

SJ Hsieh - Assembly Automation, 2013 - emerald.com
Micro-Electro-Mechanical Systems (MEMS) are miniaturized mechanical and electro-
mechanical devices and structures that are made using micro-fabrication techniques. The …

[图书][B] Development of automated robotic microassembly for three-dimensional microsystems

L Wang - 2009 - library-archives.canada.ca
Robotic microassembly is a process to leverage intelligent micro-robotic technologies to
manipulate and assemble three-dimensional complex micro-electromechanical systems …

Automated multiprobe microassembly using vision feedback

JD Wason, JT Wen, JJ Gorman… - IEEE Transactions on …, 2012 - ieeexplore.ieee.org
This paper describes the algorithm development and experimental results of a vision-guided
multiprobe microassembly system. The key focus is to develop the capabilities required for …

An active locking mechanism for assembling 3D micro structures

P Zhang, M Mayyas, WH Lee, D Popa… - … , and Systems III, 2007 - spiedigitallibrary.org
Microassembly is an enabling technology to build 3D microsystems consisting of microparts
made of different materials and processes. Multiple microparts can be connected together to …