Development trends and perspectives of future sensors and MEMS/NEMS

J Zhu, X Liu, Q Shi, T He, Z Sun, X Guo, W Liu… - Micromachines, 2019 - mdpi.com
With the fast development of the fifth-generation cellular network technology (5G), the future
sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems …

Piezoelectric MEMS—Evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

X Le, Q Shi, P Vachon, EJ Ng… - Journal of Micromechanics …, 2021 - iopscience.iop.org
The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

Progress in micro/nano sensors and nanoenergy for future AIoT-based smart home applications

A Haroun, X Le, S Gao, B Dong, T He, Z Zhang… - Nano …, 2021 - iopscience.iop.org
Self-sustainable sensing systems composed of micro/nano sensors and nano-energy
harvesters contribute significantly to developing the internet of things (IoT) systems. As one …

Technology evolution from micro-scale energy harvesters to nanogenerators

X Guo, L Liu, Z Zhang, S Gao, T He… - Journal of …, 2021 - iopscience.iop.org
Since the end of the last century, energy harvesting technologies have obtained prominent
development as the sustainable power supplies for billions of wireless sensor nodes …

Wearable multifunctional piezoelectric MEMS device for motion monitoring, health warning, and earphone

Q Wang, T Ruan, Q Xu, B Yang, J Liu - Nano Energy, 2021 - Elsevier
To solve the problem of a single function encountered by wearable electronic devices, a
multifunctional wearable piezoelectric MEMS device is presented, which performs motion …

A review of actuation and sensing mechanisms in MEMS-based sensor devices

AS Algamili, MHM Khir, JO Dennis, AY Ahmed… - Nanoscale research …, 2021 - Springer
Over the last couple of decades, the advancement in Microelectromechanical System
(MEMS) devices is highly demanded for integrating the economically miniaturized sensors …

Making use of nanoenergy from human–Nanogenerator and self-powered sensor enabled sustainable wireless IoT sensory systems

M Zhu, Z Yi, B Yang, C Lee - Nano Today, 2021 - Elsevier
Nowadays, the human body is gradually digitized by various wearable and implantable
electronics. The establishment of a sustainable wireless internet of thing (IoT) sensory …

Review of recent development of MEMS speakers

H Wang, Y Ma, Q Zheng, K Cao, Y Lu, H Xie - Micromachines, 2021 - mdpi.com
Facilitated by microelectromechanical systems (MEMS) technology, MEMS speakers or
microspeakers have been rapidly developed during the past decade to meet the …

[PDF][PDF] The future of Internet of Things (IoT) and its empowering technology

Y Perwej, MK Omer, OE Sheta, HAM Harb… - International Journal of …, 2019 - academia.edu
The Internet of Things is an intelligent network, which concatenates all things to the Internet
for the purpose of interchange information and communicating via the information sensing …

Internet of things (IoT); internet of everything (IoE); tactile internet; 5G–A (not so evanescent) unifying vision empowered by EH-MEMS (energy harvesting MEMS) and …

J Iannacci - Sensors and actuators a: physical, 2018 - Elsevier
This work aims to build inclusive vision of the Internet of Things (IoT), Internet of Everything
(IoE), Tactile Internet and 5G, leveraging on MEMS technology, with focus on Energy …