This paper presents a control algorithm for a micro-electro-mechanical system (MEMS) fast
steering mirror (FSM), whose performance is poor in open loop control mode. Based on the …

This paper presents a control system of a micro-electro-mechanical system (MEMS) fast
steering mirror (FSM). And an advanced drive method and a proportion integral differential …

To address the problem of low tracking precision caused by mechanical cross-coupling
between the axes of a two-degree-of-freedom fast steering mirror (FSM), this study …

In this paper, an approach to improve the disturbance suppression performance of a fast
steering mirror (FSM) tracking control system based on a charge-coupled device (CCD) and …

In a charge-coupled device (CCD)-based fast steering mirror (FSM) tracking control system,
high control bandwidth is the most effective way to enhance the closed-loop performance …

This paper reports the design and wide-bandwidth control of a large aperture fast steering
mirror (FSM) with integrated-sensing units. The developed FSM is driven by electromagnetic …

In the charge-coupled device (CCD)-based tracking control system of fast steering mirrors
(FSMs), high control bandwidth is the most effective method to enhance closed-loop …

Micromirrors based on micro-electro-mechanical systems (MEMS) technology are widely
employed in different areas, such as optical switching and medical scan imaging. As the key …

In this paper, a modified disturbance observer (DOB) for fast steering mirror (FSM) optical
system based on a charge-coupled device (CCD) and inertial sensors is proposed …

This article presents a novel piezo-actuated fast steering mirror (FSM) and focuses on the
integration of control design and system operation in order to improve its tracking …