Ultra-precision and ultra-smooth surfaces are vitally important for some high performance
optical systems. Ion beam figuring (IBF) is a well-established, highly deterministic method for …

Ion beam figuring (IBF) is well identified as a highly deterministic method for the final figuring
of nanometer-precision optical surfaces, where the figuring process involves an …

Ion beam figuring (IBF) provides a highly deterministic method for high-precision optical
surface fabrication, whereas ion-induced microscopic morphology evolution would occur on …

Self-organization by low-energy ion beam erosion provides an alternative route for the
fabrication of nanostructures on different materials in only one step. This study focuses on …

We investigate the ripple pattern formation on Si surfaces at room temperature during
normal incidence ion beam erosion under simultaneous deposition of different metallic co …

The formation of self-organized Si nanostructures induced by Mo seeding during normal
incidence Ar+ ion bombardment at room temperature is reported. Silicon surfaces without …

Low energy ion beam pattern formation on Si with simultaneous co-deposition of Ag, Pd, Pb,
Ir, Fe or C impurities was investigated by in situ scanning tunneling microscopy as well as ex …

Variation in the thicknesses of amorphous layer during ripple evolution on Si surface by 50
keV Ar+ ion bombardment has been studied as a function of ion fluence. Atomic force …

Damage profiles on Si (001) surface via argon gas cluster ion beam sputtering and mono‐
atomic argon ion beam sputtering were investigated using medium energy ion scattering …

Si wafers of (100),(110) and (111) orientations were bombarded by gas cluster ion beam
(GCIB) of 3000 Ar-atoms/cluster on average at a series of angles. Similar surface …