Fundamental characteristics of MEMS resonators such as acoustic velocity and energy
dissipation may have strong temperature and process dependencies that must be carefully …

This paper presents various frequency trimming methodologies with the focus on silicon
based micromechanical resonators. The techniques include mechanical trimming and pure …

In this paper, we present useful modeling procedures intended to characterize and optimize
MEMS resonator-filter designs. We address two major areas:(1) the impedance of the …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

Silicon MEMS resonators with high levels of frequency stability are demonstrated in an
oscillator system suitable for use as a frequency reference. The use of resonator quality …

We report a conventionally batch micromachined silicon tuning fork MEMS resonator, with
ultra-low energy dissipation. The dissipation time constant of 25 minutes was experimentally …

An electronic system for temperature compensation of MEMS resonators is proposed. The
system is based on a dual resonator compensation technique using thermal feedback. It …

0001 1. Field of the Invention 0002 Embodiments of the present invention relate gener ally to
temperature compensated microelectromechanical systems (MEMS) oscillators and, more …

This research examines the energy loss in micromechanical resonators fabricated in a
CMOS-MEMS process. Characterization and understanding of energy loss is a first step to …

In this work, we proposed a methodology to enhance thermal stability of MEMS resonators
by the use of a constant-structural-resistance control where temperature coefficient of …