A micro optoelectromechanical system (MOEMS) resonator gyroscope based on a
waveguide micro-ring resonator was proposed. This sensor was operated by measuring the …

In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS)
gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS …

In this paper, the characterization of a whispering gallery mode (WGM) resonator applied in
a novel micro-opto-electro-mechanical system (MOEMS) gyroscope was investigated. The …

Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-
mechanical system (MOEMS) are the new-generation and recently well-developed …

In this paper, a novel vibratory optical MEMS gyroscope is proposed, which is composed of
an optical sensing system, an electrostatic comb-drive actuator, and a mass-spring system …

A novel dual-mass resonant output micromechanical gyroscope is proposed which utilizes
resonant sensing as the basis for Coriolis force detection instead of displacement sensing. It …

A robust optimal design of a bulk-micromachined, decoupled vibratory microgyroscope was
carried out to determine geometric dimensions such that the gyroscopic performance is least …

Based on Sagnac effect and MEMS fabrication technique, resonator micro-optic gyro
(RMOG) makes essential sense in promoting miniaturized and sensitive gyros. In this letter …

Waveguide ring resonator (WRR) is beneficial to the miniaturization and integration of the
resonant micro optic gyroscope (RMOG). The shot-noise-limited sensitivity of the RMOG …

An open-loop resonator micro-optic gyro (R-MOG) with a 6 cm-long waveguide-type ring
resonator is set up using the phase modulation spectroscopy technique. In the experiment …