We demonstrate a novel, to the best of our knowledge, micro-opto-electro-mechanical
system (MOEMS) gyroscope based on the Talbot effect of a single-layer near-field diffraction …

In this paper, we present the design, fabrication, and test of a micro-opto-electro-mechanical
systems (MOEMS) accelerometer based on the Talbot effect of double-layer diffraction …

The central concept underpinning the operation of the micro-gyroscope is the detection of
the weak Coriolis force. We describe in detail the working principle of an optical micro …

This paper describes the design and principle behind the demonstrated novel lamellar
grating out-of-plane gyroscope design. The sensing mechanism is based on out-of-plane …

In this paper, using a MOEMS cantilever, an opto-plasmonic gyroscope is introduced. A
metallic grating, as the substrate for surface plasmon polaritons, is employed on the …

A high-precision microdisplacement sensor based on zeroth-order diffraction of a single-
layer optical grating is reported. Laser grating interference occurs when part of the laser is …

Here, we report an ultracompact angular displacement sensor based on the Talbot effect of
optical microgratings. Periodic Talbot interference patterns were obtained behind an upper …

An ultrasensitive single-axis in-plane micro-optical-electro-mechanical-system (MOEMS)
accelerometer based on the Talbot effect of dual-layer gratings is proposed. Based on the …

A novel doubly decoupled bulk micromachined lateral gyroscope, proposed in our former
work, can efficiently suppress the undesired mechanical coupling, while remaining …

Conclusions: A model of a weighted-stiffness DAC has been proposed for the first time. Both
the width and the number of the lateral beams were used to produce different stiffness, while …