Fabrication and functionalization of nanochannels by electron-beam-induced silicon oxide deposition

C Danelon, C Santschi, J Brugger, H Vogel - Langmuir, 2006 - ACS Publications
We report on the fabrication and electrical characterization of functionalized solid-state
nanopores in low stress silicon nitride membranes. First, a pore of∼ 50 nm diameter was …

Fabrication of solid-state nanopores with single-nanometre precision

AJ Storm, JH Chen, XS Ling, HW Zandbergen… - Nature materials, 2003 - nature.com
Single nanometre-sized pores (nanopores) embedded in an insulating membrane are an
exciting new class of nanosensors for rapid electrical detection and characterization of …

Control of shape and material composition of solid-state nanopores

MY Wu, RMM Smeets, M Zandbergen, U Ziese… - Nano …, 2009 - ACS Publications
Solid-state nanopores fabricated by a high-intensity electron beam in ceramic membranes
can be fine-tuned on three-dimensional geometry and composition by choice of materials …

Modulation of charge density and charge polarity of nanopore wall by salt gradient and voltage

CY Lin, E Turker Acar, JW Polster, K Lin, JP Hsu… - ACS …, 2019 - ACS Publications
Surface charge plays a very important role in biological processes including ionic and
molecular transport across a cell membrane. Placement of charges and charge patterns on …

Fabrication of cylindrical nanopores and nanopore arrays in silicon-on-insulator substrates

L Petrossian, SJ Wilk, P Joshi, S Hihath… - Journal of …, 2007 - ieeexplore.ieee.org
Electron-beam lithography and reactive ion etching were used to process silicon-on-
insulator substrates for the fabrication of single cylindrical high-aspect-ratio solid-state …

Electrically tunable solid-state silicon nanopore ion filter

J Vidal, ME Gracheva, JP Leburton - Nanoscale Research Letters, 2007 - Springer
We show that a nanopore in a silicon membrane connected to a voltage source can be used
as an electrically tunable ion filter. By applying a voltage between the heavily doped …

Ion Concentration Polarization Tunes Interpore Interactions and Transport Properties of Nanopore Arrays

E Cao, DV Cain, S Silva, ZS Siwy - Advanced Functional …, 2024 - Wiley Online Library
Biological processes require concerted function of many channels embedded in the cell
membrane. While single solid‐state nanopores are already designed to mimic properties of …

Localized functionalization of single nanopores

J Nilsson, JRI Lee, TV Ratto, SE Létant - Advanced materials, 2006 - Wiley Online Library
The Coulter-counter principle used for cell enumeration in hematology laboratories is based
on the fact that the ionic current through a single aperture drops each time a cell obstructs …

Silicon nitride nanosieve membrane

HD Tong, HV Jansen, VJ Gadgil, CG Bostan… - Nano …, 2004 - ACS Publications
An array of very uniform cylindrical nanopores with a pore diameter as small as 25 nm has
been fabricated in an ultrathin micromachined silicon nitride membrane using focused ion …

Fabrication and characterization of nanopore-based electrodes with radii down to 2 nm

D Krapf, MY Wu, RMM Smeets, HW Zandbergen… - Nano Letters, 2006 - ACS Publications
We report on the fabrication and characterization of gold nanoelectrodes with carefully
controlled nanometer dimensions in a matrix of insulating silicon nitride. A focused electron …