Mechanisms and characterization of a novel hybrid laser-enhanced particle laden electrochemical fabrication process for high quality micro-dimples on germanium …

H Zhu, J Han, J Wang, Q Zhang, Z Zhang… - Journal of Materials …, 2024 - Elsevier
The first-generation semiconductor materials represented by silicon (Si) and germanium
(Ge) still hold a dominant position in many fields, including micro-electromechanical systems …

Fabrication of oxide-free dimple structure on germanium via electrochemical jet machining enhanced by opposing laser irradiation

H Zhu, Z Jiang, J Han, V Saetang, K Xu, Y Liu… - Journal of Manufacturing …, 2023 - Elsevier
The electrochemical machining (ECM) of germanium (Ge) wafer can be significantly
improved in terms of efficiency and localization by introducing laser irradiation. However …

Localized and efficient machining of germanium based on the auto-coupling between picosecond laser irradiation and electrochemical dissolution: Mechanism …

H Zhu, C Wang, S Mao, Z Zhang, D Zhao, K Xu… - Journal of Manufacturing …, 2022 - Elsevier
The auto-coupling effect between picosecond (ps) laser irradiation and electrochemical
dissolution is proposed to achieve localized and efficient dimpling of germanium (Ge), in …

Removal of islands from micro-dimple arrays prepared by through-mask electrochemical micromachining

X Chen, N Qu, H Li, Z Guo - Precision Engineering, 2015 - Elsevier
Surface texture plays a fundamental role in tribology, allowing for the improvement of the
friction and lubrication performances of various mechanical components. Through-mask …

Influence of bubbles on micro-dimples prepared by electrochemical micromachining

X Zhang, H Li, Z Yin, K Ren - Journal of Applied Electrochemistry, 2019 - Springer
Micro-dimples are the basic surface textures that have played an important role in reducing
or increasing friction, anti-wear, decreasing vibration, anti-adhesion, and creeping …

[HTML][HTML] Surface modification using assisting electrodes in wire electrical discharge machining for silicon wafer preparation

C Kuo, Y Nien, A Chiang, A Hirata - Materials, 2021 - mdpi.com
This paper outlines notable advances in the wire electrical discharge machining of
polycrystalline silicon workpieces for wafer preparation. Our use of assisting electrodes …

Fabrication of PDMS micro through-holes for electrochemical micromachining

N Qu, X Chen, H Li, D Zhu - The International Journal of Advanced …, 2014 - Springer
Surface texture has played a fundamental role in the development of many advanced fields.
Through mask electrochemical micromachining (TMEMM) is a feasible alternative for …

Investigations of micro-dimples prepared by the multiple sandwich-like electrochemical micromachining

X Zhang, H Li, Z Yin, R Kun - International Journal of Electrochemical …, 2019 - Elsevier
Micro-dimples are widely used in tribology as a surface texture and play a significant role in
improving interfacial performance, allowing for reducing friction and wear, reducing vibration …

Experimental investigation into micro-textured surface generation by through-mask electrochemical micromachining

S Mahata, B Bhattacharyya - Surface Engineering and Applied …, 2020 - Springer
Micro texturing with dimples is one of the most established methods for the enhancement of
lubrication and tribological performance. In this work, a novel approach of through-mask …

Fabrication of micro-dimple arrays by AS-EMM and EMM

M Wang, Z Bao, G Qiu, X Xu - The International Journal of Advanced …, 2017 - Springer
In order to produce micro-dimple arrays in a metal surface with high precision, efficiency,
and stability, a new processing method, air-shielding electrochemical micro-machining (AS …