Cantilevered waveguides suspended above an air cavity in an underlying substrate are
described. The waveguide is formed by patterning a waveguide layer in some embodi …

Techniques for forming a facet optical coupler that includes a waveguide formed over a
trench of a silicon substrate are described. The trench is formed in a silicon substrate and …

Techniques for forming a facet optical coupler that includes a waveguide formed over a
trench of a silicon substrate are described. The trench is formed in a silicon substrate and …

Abstract Development of Integrated Optical Circuits depends greatly on progress in coupling
light to and between chip devices. Exemplary disclosed embodiments provide a system and …

A facet optical coupler, and techniques for forming a facet optical coupler, that includes a
waveguide disposed in a trench of a substrate are described. The substrate may be a silicon …

Methods and devices are provided for fabricating waveguides. Some such methods involve
forming at least a portion of the waveguide using an embossing process for shaping a …

Techniques for forming a facet optical coupler to couple light at an edge of silicon substrate
are described. The facet optical coupler includes a silicon Substrate, a layer of second …

Techniques for forming a facet optical coupler to couple light at an edge of silicon substrate
are described. The facet optical coupler includes a silicon substrate, a layer of second …

(57) ABSTRACT A semiconductor photonic device includes a substrate, fa cet (s), and
optical coupler (s) associated with the facet (s). Each optical coupler can couple an …

Systems and methods according to these exemplary embodi ments provide for on-chip
optical waveguides, methods of making on-chip optical waveguides, and devices including …